Storage Device Liquid Discharge via Capillary Communication Pipe
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in achieving high productivity due to lengthy maintenance times and inefficiencies in liquid handling and disposal, particularly when dealing with multiple materials and low vapor pressure liquids, which lead to increased downtime and substrate quality degradation.
Innovation Solution
A storage device with a cylindrical sidewall, a cover wall, a bottom wall with a recess and communication pipe system that utilizes a capillary tube phenomenon to efficiently discharge liquids, allowing for pressurized liquid removal and cleaning without leakage, enabling quick maintenance and reducing downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional storage tank structure is used, then the liquid can be stored, but the maintenance time is lengthy and productivity is reduced
Solution Approach 1:
The storage tank structure is segmented into multiple functional components: a storage chamber for liquid storage, a discharge chamber for liquid collection and removal, and a communication pipe system connecting them. This segmentation allows independent maintenance of each component, significantly reducing overall maintenance time and improving productivity.
2Reliability
If liquid is stored in a conventional tank, then storage is achieved, but liquid residue reactions occur and substrate quality degrades
Solution Approach 1:
The discharge chamber is designed to extract and remove all liquid residues from the storage chamber through the communication pipe system. This complete liquid removal prevents residue reactions that would otherwise degrade substrate quality, ensuring reliable processing results.
3Productivity
If a simple discharge structure is used, then the structure is simple, but liquid discharge is inefficient and leakage occurs
Solution Approach 1:
The communication pipe system utilizes pressure differential principles to achieve efficient liquid discharge. By controlling pressure differences between the storage chamber and discharge chamber, the system enables complete and controlled liquid removal without complex mechanical pumping mechanisms, balancing efficiency with structural simplicity.
4Object-generated harmful factors
If the communication pipe has the same diameter as the recess, then liquid flow is easy, but liquid residue remains in the recess
Solution Approach 1:
The communication pipe has a smaller diameter than the recess opening, creating a localized narrow passage that acts as a liquid trap. This local quality change ensures that liquid flows easily through the larger recess opening while the narrower pipe section prevents residue from remaining in the recess, effectively eliminating liquid residue accumulation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables efficient liquid removal and cleaning with reduced downtime, improving overall productivity by preventing liquid residue reactions and maintaining substrate quality.
Implementation Method 1
a communication pipe having one end connected to a bottom portion of the recess in a direction of gravity and the other end extending in a direction different from the direction of gravity in the bottom wall, the communication pipe having a diameter smaller than that of the recess
Data Source
AI summary
A storage device includes: a sidewall formed in a cylindrical shape; a cover wall disposed at an upper end of the sidewall; a bottom wall connected to a lower end of the sidewall and comprising a mounting surface mountable on a weight detector; a storage chamber surrounded by the sidewall, the cover wall, and the bottom wall; a recess communicating with the storage chamber and provided at the bottom wall; a communication pipe having one end connected to a bottom portion of the recess in a direction of gravity and the other end extending in a direction different from the direction of gravity in the bottom wall, the communication pipe having a diameter smaller than that of the recess; a gas flow path provided at a wall other than the bottom wall; and a liquid discharge path connected to a downstream side of the communication pipe.