Storage Transfer Module Vertical Stacking for Semiconductor Liquid Capacity
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Solution Overview
Problem
The existing substrate treatment apparatuses in semiconductor manufacturing face limitations in storage capacity for chemical liquid containers due to space constraints, leading to frequent replenishment needs and reduced wafer production efficiency.
Innovation Solution
A compact storage and transfer module with a multistage accommodation structure is introduced, allowing for the vertical stacking of treatment liquid containers and optimizing the conveyance path of substrates, thereby enabling a more compact apparatus design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the accommodation region is designed with a wafer conveying robot in the upper portion, then substrate transfer function is achieved, but the height of the accommodation region is limited and only a limited number of chemical containers can be stored
Solution Approach 1:
The patent transitions from a two-dimensional horizontal arrangement of chemical containers to a three-dimensional vertical stacking configuration. Multiple support plates are arranged vertically within the accommodation region, allowing chemical containers to be stored in multiple layers. This dimensional change maximizes the use of vertical space while maintaining the required substrate transfer functionality in the horizontal plane.
2Productivity
If multiple manufacturing facilities are installed in a limited space, then production capacity is increased, but the length of the accommodation space is limited
Solution Approach 1:
The patent resolves the space limitation by utilizing the vertical dimension for chemical container storage while keeping the horizontal footprint compact. The multi-level support plate structure allows sufficient chemical container capacity without extending the length of the accommodation region, enabling closer spacing of manufacturing facilities and increased overall productivity.
3Productivity
If chemical containers are stored in a limited accommodation space, then space utilization is optimized, but frequent replenishment operations are required
Solution Approach 1:
The patent prepares multiple chemical containers in advance by storing them in a multi-layer vertical configuration within the accommodation region. This preliminary action ensures that when one chemical container is depleted, replacement containers are already positioned and ready for immediate substitution, eliminating downtime and maintaining continuous wafer production without frequent replenishment interruptions.
Data Source
AI summary
A storage and transfer module includes a module body, a storage and transfer unit disposed in the module body, the storage and transfer unit including a liftable transfer portion, and a storage portion disposed on the outside of the transfer portion, the storage portion having a storage space therein, and a transfer target portion in which a substrate is transferred by the transfer portion. A pair of the storage and transfer units are provided. The pair of storage and transfer units are disposed to oppose each other with the transfer target portion interposed therebetween. A substrate loading portion is disposed on one side of the storage and transfer units.