Strain Isolation Guide Structure for Charged Particle Beam Devices
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Solution Overview
Problem
Existing charged particle beam devices face challenges in suppressing table deformation caused by rolling element movement, leading to visual field positioning errors due to insufficient strain isolation and reduced guide rigidity.
Innovation Solution
A sample stage with a strain isolation guide structure, featuring an elastically deformable adapter connecting the table and carriage, with alternating connection portions to absorb and isolate strain, thereby reducing deformation and improving positioning accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If crowning is provided on the bearing surface of the guide to reduce vibration, then vibration is reduced, but a large bearing surface is required and the dimensions of the carriage increase
Solution Approach 1:
The guide structure is segmented into multiple rolling elements (first rolling elements and second rolling elements) arranged in different directions. This segmentation allows vibration reduction in multiple directions without requiring a large single bearing surface, thus reducing carriage dimensions while maintaining stability.
Solution Approach 2:
The guide structure employs nested rolling elements where first rolling elements and second rolling elements are arranged in overlapping or complementary configurations. This nesting allows the guide to achieve vibration reduction characteristics of crowning without increasing the overall bearing surface area.
2Stability of the object's composition
If crowning is provided on the bearing surface to reduce vibration, then vibration is reduced, but force applied to the carriage does not decrease and deformation occurs causing position shift
Solution Approach 1:
Different rolling elements are positioned at specific locations on the guide rail to provide localized support. The first rolling elements are arranged in a first direction and second rolling elements in a second direction, creating local quality variations that distribute applied forces evenly and prevent concentrated deformation that would cause positioning errors.
Solution Approach 2:
The guide structure transitions from a static rigid bearing surface to a dynamic system with multiple rolling elements that can independently respond to applied forces. This dynamic configuration allows the guide to adapt to varying force conditions, reducing deformation and maintaining positioning accuracy.
3Temperature
If one carriage is supported by a spring to absorb thermal deformation, then sliding resistance is prevented from increasing, but strain is transmitted from the other carriage and table deformation suppression is insufficient
Solution Approach 1:
The support system is segmented to include multiple rolling elements that independently handle thermal expansion and contraction forces. By distributing the thermal compensation function across multiple rolling elements rather than relying on a single spring, the system effectively suppresses table deformation while maintaining low sliding resistance.
4Temperature
If one carriage is supported by a spring, then thermal deformation is compensated, but guide rigidity significantly decreases and vibration characteristics are deteriorated
Solution Approach 1:
The guide structure changes the physical parameters of the bearing system by using multiple rolling elements with optimized dimensions and arrangements. This allows thermal deformation compensation without significantly reducing guide rigidity, as the distributed rolling contact maintains structural stiffness while accommodating thermal expansion.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The strain isolation guide structure effectively suppresses table deformation and visual field positioning errors, enhancing the precision of charged particle beam devices by reducing strain propagation from the carriage to the table.
Implementation Method 1
a carriage that supports the table and moves along the guide rail together with the table by movement accompanying rotation of a rolling element included inside the carriage
Implementation Method 2
an adapter connecting the table and the carriage and having a first protruding portion protruding toward at least one of the table and the carriage
Data Source
AI summary
The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.