Strain Sensing Element With Fe1−yBy Layer For High Gauge Factor

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Solution Overview

Problem

Current strain sensing elements using spin technology face challenges in enhancing sensitivity due to limitations in material selection, where magnetic materials exhibit either excellent magnetostriction, soft magnetic properties, or magnetic resistance effects but not all three simultaneously, making it difficult to achieve high sensitivity in strain detection.

Innovation Solution

A strain sensing element is designed with a second magnetic layer composed of Fe1−yBy (0<y≤0.3) and an intermediate layer, where the second magnetic layer's magnetization changes with substrate deformation, utilizing a combination of magnetostriction, soft magnetic properties, and magnetic resistance effects to enhance sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If magnetic materials are selected to exhibit excellent magnetostriction, then strain detection capability is improved, but magnetic resistance effect is reduced

Engineering Contradiction:
Improvestrain detection capabilityVSAvoidmagnetic resistance effect
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The magnetic layer is divided into multiple sub-layers with different thicknesses and compositions. The first magnetic sub-layer has thickness of 3-7 nm and the second magnetic sub-layer has thickness of 1-3 nm, allowing each sub-layer to contribute different magnetic properties to the overall structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the magnetic layer are given different properties through varying thickness and composition. The first magnetic sub-layer with greater thickness provides magnetostriction, while the second magnetic sub-layer with smaller thickness provides magnetic resistance effect, creating local optimization of properties.

Inventive Principle:
Principle #3Local quality

2Ease of operation

If magnetic materials are selected to exhibit soft magnetic properties, then ease of magnetization is improved, but magnetic resistance effect is reduced

Engineering Contradiction:
Improveease of magnetizationVSAvoidmagnetic resistance effect
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The magnetic layer is segmented into two sub-layers with different thicknesses. The first magnetic sub-layer (3-7 nm) provides soft magnetic properties for easy magnetization, while the second magnetic sub-layer (1-3 nm) provides magnetic resistance effect, resolving the contradiction through segmentation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention uses a composite magnetic structure combining two different magnetic sub-layers with different thicknesses and properties. This composite structure integrates both soft magnetic properties and magnetic resistance effect in a single layer, achieving both ease of magnetization and reliable magnetic resistance.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed solution achieves a high gauge factor and improved sensitivity by optimizing the magnetic properties of the second magnetic layer, allowing for effective strain detection with a balanced magnetostriction and magnetic resistance effect.

Implementation Method 1

the second magnetic layer's magnetization changes with substrate deformation, utilizing a combination of magnetostriction, soft magnetic properties, and magnetic resistance effects

Methodology Applied
Scientific EffectMagnetostriction: Magnetostriction

Implementation Method 2

utilizing a combination of magnetostriction, soft magnetic properties, and magnetic resistance effects to enhance sensitivity

Methodology Applied
Scientific EffectMagnetic resistance effect: Magnetoresistance

Data Source

PatentUS10444085B2Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel
Publication Date: 2019.10.15 KK TOSHIBA
  • US10444085B2 patent drawing
  • US10444085B2 patent drawing
  • US10444085B2 patent drawing

AI summary

The disclosure relates to a strain sensing element provided on a deformable substrate. The strain sensing element includes: a first magnetic layer; a second magnetic layer; and an intermediate layer. The second magnetic layer includes Fe1−yBy (0&lt;y≤0.3). Magnetization of the second magnetic layer changes according to deformation of the substrate. The intermediate layer is provided between the first magnetic layer and the second magnetic layer.