Stretchable Mask Body for Cylinder Bore Film Formation
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Solution Overview
Problem
The challenge is to maintain a precise and high-quality film formation on the inner surface of cylindrical works during the film forming process, as thermal expansion of the work or mask member can disrupt the vacuum state and affect the film formation precision and quality.
Innovation Solution
A film forming apparatus with a mask body that includes a main body portion capable of stretching and contracting, featuring tubular members with a sliding insert structure, a sealing member, and a biasing member to maintain contact with the work's inner surface, ensuring precise exposure of the film formation area and masking of non-formation areas, while maintaining a vacuum state and preventing plasma or gas leakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mask member is used to mask the non-formation portion, then film formation precision is improved, but thermal expansion of the mask member disrupts the vacuum state
Solution Approach 1:
The mask member is designed with a flexible main body portion that can dynamically adjust its state. The tubular members can slide relative to each other along the axial direction, allowing the mask body to stretch and contract in response to thermal expansion while maintaining contact with the workpiece inner surface and preserving the vacuum state.
Solution Approach 2:
The physical parameters of the mask member are designed to change with temperature. The tubular members are configured to expand and contract axially when heated, allowing the mask body to accommodate thermal expansion without compromising the vacuum seal or film formation precision.
2Manufacturing precision
If the mask body is rigid to maintain precise masking, then film formation precision is improved, but thermal expansion causes vacuum state disruption
Solution Approach 1:
The mask body transitions from a rigid structure to a dynamic structure with sliding tubular members. This allows the mask to maintain precise positioning during film formation while accommodating thermal expansion through controlled movement of the tubular members relative to each other.
Solution Approach 2:
The sliding insert structure acts as an intermediary mechanism between the rigid masking requirement and the thermal expansion reality. The tubular members provide a controlled interface that allows expansion while maintaining the functional integrity of the mask.
3Reliability
If tubular members are made slidable to accommodate thermal expansion, then vacuum state is maintained, but device complexity increases
Solution Approach 1:
The mask body is segmented into multiple tubular members that can move independently. This segmentation allows each tubular member to handle thermal expansion locally, simplifying the overall design compared to a single complex flexible structure while maintaining vacuum integrity.
Solution Approach 2:
The sliding mechanism provides automatic feedback response to thermal expansion. When the mask body heats up, the tubular members naturally slide to accommodate the expansion, creating a self-regulating system that maintains vacuum state without complex control mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for precise and high-quality film formation on the inner surface of cylindrical works by accommodating thermal expansion, maintaining a vacuum state, and preventing leakage, thus improving film formation precision and efficiency.
Implementation Method 1
a biasing member configured to resiliently bias the tubular members in a stretching direction of the main body portion
Implementation Method 2
A work and a mask member receive an input of heat from plasma during film formation, raise temperatures and therefore readily thermally expand
Implementation Method 3
it is possible to maintain a vacuum state of an interior of the main body portion well during film formation
Data Source
AI summary
A film forming apparatus (10) includes a mask body (34) configured to expose inner surfaces (14a) of cylinder bores (14), and mask an inner surface (16a) of a crankcase (16). The mask body (34) includes a main body portion (104), a sealing member (106) and a biasing member (108). The main body portion (104) is configured to stretch and contract, and includes a first tubular member (100) and a second tubular member (102) configured to have an insert structure at least part of which is slidable along an axial direction. The main body portion (104) can stretch and contact in a state where at least one end in the axial direction thereof contacts an inner surface of a cylinder block (12). The sealing member (106) is interposed between sliding surfaces of the first tubular member (100) and the second tubular member (102). The biasing member (108) is configured to resiliently bias the first tubular member (100) and the second tubular member (102) in a stretching direction of the main body portion (104).