Printable Stretchable Thin-Film Transistors Using Carbon Nanotubes

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Solution Overview

Problem

The development of large-area, low-cost, high-performance intrinsically stretchable electronic devices has been hindered by the lack of reliable material platforms and scalable fabrication processes, with existing methods either being costly or limited to proof-of-concept demonstrations of individual transistors.

Innovation Solution

The use of fully-printed, intrinsically stretchable thin-film transistors and integrated logic circuits fabricated on elastomeric substrates, utilizing carbon nanotubes and a hybrid gate dielectric comprising PDMS and barium titanate nanoparticles, which provides high dielectric constant, superior stretchability, and compatibility with the substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional cleanroom-based microfabrication processes are used with rigid semiconductors, then high-performance stretchable electronic systems can be demonstrated, but manufacturing cost becomes extremely high and large-area fabrication is not feasible

Engineering Contradiction:
Improveperformance of stretchable electronic systemsVSAvoidmanufacturing cost and scalability
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The invention changes the material parameters from rigid semiconductors to intrinsically stretchable materials (silver nanowires, carbon nanotubes, graphene, conductive polymers, organic semiconductors). This parameter change enables the use of solution processing and printing techniques instead of conventional cleanroom microfabrication, dramatically reducing manufacturing cost while maintaining device performance and enabling large-area fabrication.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention replaces the mechanical microfabrication system (cleanroom-based lithography, etching, deposition) with a printing-based fabrication system. This substitution uses solution processing and inkjet or screen printing techniques to deposit functional materials, eliminating the need for expensive cleanroom equipment and complex multi-step fabrication processes while achieving comparable or superior device performance.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If structural stretchability is enabled by buckling or serpentine structures in stiffened materials, then stretchable electronic systems can be realized, but the area occupied by active devices is only a fraction of the total area with the rest being wasted voids

Engineering Contradiction:
Improvestretchability of electronic systemsVSAvoidarea utilization efficiency
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The invention changes the fundamental material parameter from stiffened materials with structural stretchability features to intrinsically stretchable materials. This eliminates the need for buckling or serpentine structures, allowing continuous deposition of functional materials across the entire substrate area without voids, achieving 100% area utilization while maintaining stretchability.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

Instead of making rigid materials stretchable through structural modifications (buckling, serpentine patterns), the invention inverts the approach by using materials that are inherently stretchable at the molecular level. This inversion eliminates the need for space-consuming structural features and enables continuous material deposition across the entire device area.

Inventive Principle:
Principle #13The other way round (Inversion)

3Ease of manufacture

If intrinsically stretchable materials are used, then solution processibility and printability are achieved enabling large-area manufacturing, but reliable high-performance material platforms and scalable fabrication processes do not exist

Engineering Contradiction:
Improveprintability and large-area fabrication capabilityVSAvoidperformance and robustness of stretchable electronic devices
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The invention uses composite material systems combining intrinsically stretchable components (silver nanowires, carbon nanotubes, graphene, conductive polymers, organic semiconductors) with appropriate matrix materials and dielectric layers. These composite structures enable simultaneous achievement of stretchability, electrical performance, and solution processibility, creating reliable material platforms for large-area manufacturing.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The invention develops universal material platforms and fabrication processes that can be used across different device types and applications. The printing-based fabrication process using solution-processible materials provides a multi-functional platform that enables simultaneous fabrication of electrodes, semiconductors, and dielectric layers, achieving both high performance and scalability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The approach enables the production of stretchable electronic devices that can withstand tensile strains beyond 50% for thousands of cycles with no significant degradation in electrical performance, suitable for large-area and cost-effective manufacturing.

Implementation Method 1

utilizing carbon nanotubes and a hybrid gate dielectric comprising PDMS and barium titanate nanoparticles, which provides high dielectric constant, superior stretchability, and compatibility with the substrate

Methodology Applied
Scientific EffectDielectric permittivity: Dielectric Permittivity

Implementation Method 2

one or more thin-film transistor elements having a source, a drain, and/or a gate electrode formed of carbon nanotubes (CNTs)

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 3

a stretchable polydimethylsiloxane (PDMS) substrate

Methodology Applied
Scientific EffectElasticity: Elasticity

Data Source

PatentUS11302685B2Fully-printed stretchable thin-film transistors and integrated logic circuits
Publication Date: 2022.04.12 BOARD OF TRUSTEES OPERATING MICHIGAN STATE UNIV
  • US11302685B2 patent drawing
  • US11302685B2 patent drawing
  • US11302685B2 patent drawing

AI summary

Printable and stretchable thin-film devices and fabrication techniques are provided for forming fully-printed, intrinsically stretchable thin-film transistors and integrated logic circuits using stretchable elastomer substrates such as polydimethylsiloxane (PDMS), semiconducting carbon nanotube network as channel, unsorted carbon nanotube network as source/drain/gate electrodes, and BaTiO3/PDMS composite as gate dielectric. Printable stretchable dielectric layer ink may be formed by mixing barium titanate nanoparticle (BaTiO3) with PDMS using 4-methyl-2-pentanone as solvent.