Multi-Stage Stripping Solution Machine with Segmented Filters
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Solution Overview
Problem
In semiconductor processing, the lift-off process often clogs filter devices in stripping-solution machines due to thin film detrital matters, leading to frequent machine shutdowns and reduced production efficiency.
Innovation Solution
A stripping-solution machine with multiple stages of chambers and filter devices connected by pipes with valve switches, allowing for independent control of each filter device, enabling occluded filters to be removed without halting the process, ensuring continuous operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a filter device is used to remove thin film detrital matters from stripping solution, then the stripping solution quality is improved, but the filter device becomes choked and requires frequent cleaning, reducing production efficiency
Solution Approach 1:
The filter device is divided into multiple filter elements arranged in parallel, where each filter element can be independently controlled and removed. When one filter element becomes choked, only that specific element needs to be replaced while others continue operating, preventing complete production shutdown and maintaining productivity while ensuring solution quality.
2Reliability
If the filter device is cleaned or replaced, then the filter functionality is restored, but the entire stripping-solution machine must be stopped, reducing production efficiency
Solution Approach 1:
The filter device consists of multiple independently controllable filter elements with separate control valves. This segmentation allows one filter element to be removed and cleaned while other elements remain in service, eliminating the need to stop the entire machine for filter maintenance and reducing downtime significantly.
Solution Approach 2:
By having multiple filter elements operating in parallel with independent control, the system ensures continuous operation of the stripping-solution machine. When one filter element requires maintenance, the others continue filtering the stripping solution, maintaining the useful action without interruption and preventing machine shutdown.
3Productivity
If multiple filter elements are arranged in parallel with independent control valves, then the system allows continuous operation during filter maintenance, but the device complexity increases
Solution Approach 1:
The filter device is segmented into multiple identical filter elements, each with its own control valve and removal mechanism. This modular segmentation enables independent control of each element, allowing maintenance of one element without affecting others, thus achieving continuous operation. The complexity increase is managed through standardized modular design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design prevents production interruptions by allowing choked filter devices to be cleaned without stopping the entire process, thereby improving production efficiency and maintaining continuous operation.
Implementation Method 1
a filter device, wherein one end of the filter device is correspondingly connected to a storage box of a current stage chamber by a first pipe, and another end of the filter device is connected to a next stage chamber by a second pipe
Data Source
AI summary
A stripping-solution machine and working method thereof are provided. The stripping-solution machine includes: a plurality stages of chambers, which are arranged sequentially in order, wherein each stage of the chamber is correspondingly connected to a storage box; at least one filter device, wherein one end of the filter device is disposed to be connected to a storage box corresponding to a current stage chamber by a first pipe, and another end of the filter device is connected to a next stage chamber by a second pipe. Furthermore, a plurality of valve switches are at least disposed on the first pipe or the second pipe.