Structured Component Defect Analysis via Local and Summed Deviation Comparison
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Solution Overview
Problem
Current defect analysis methods for structured components, such as lithography masks, fail to effectively identify non-tolerable defects that arise from small local deviations which, when summed, exceed tolerance values, despite being within individual local deviation tolerances.
Innovation Solution
A method that compares both local and summed deviations with specified tolerance values, using a test path that can be rectilinear, curved, or closed, and employs a software algorithm for integration to determine defects independently of test path location, allowing for precise examination of local deviations and intensity measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If only individual local deviation checks are performed, then the inspection process remains simple, but defects with small local deviations that exceed tolerance when summed are missed
Solution Approach 1:
The defect analysis method segments the evaluation into two distinct levels: individual local deviation checks at multiple test path locations, and a subsequent summation of these deviations. This segmentation allows the system to maintain simple local measurements while adding a summation layer that captures cumulative defects, thereby improving reliability without overly complicating the base measurement process.
Solution Approach 2:
The invention adds a new dimension to the analysis by introducing the summation of local deviations across multiple test path locations. Instead of evaluating only the magnitude of individual deviations, the method incorporates a cumulative dimension that aggregates deviations along the test path, enabling detection of defects that manifest through accumulated small deviations rather than single large deviations.
2Reliability
If multiple test path locations are examined, then defect detection coverage improves, but the analysis time increases
Solution Approach 1:
The method performs preliminary local deviation checks at multiple test path locations and stores these results, then uses them for subsequent summation analysis. By preparing and storing individual deviation data in advance, the system enables efficient cumulative evaluation without repeating measurements, thus improving detection coverage while minimizing additional analysis time.
3Measurement precision
If separate summation of positive and negative deviations is performed, then accurate defect identification improves, but calculation complexity increases
Solution Approach 1:
The summation process is segmented into separate calculations for positive deviations and negative deviations. This segmentation prevents cancellation effects where positive and negative deviations might offset each other, ensuring that the total magnitude of deviations is accurately captured. The separate summation approach maintains measurement precision by treating deviation types independently while keeping the calculation methodology systematic and manageable.
Data Source
AI summary
An analysis of the defects of a structured component includes a check of a local deviation between an actual structure dimension of the component and a target structure dimension of the component. In this context, the local deviation is checked at a location of a test path along a deviation coordinate which extends across the test path. The test is repeated at a plurality of different test path locations within a test region of the test path. A summed local deviation between the actual structure dimension and the target structure dimension over the test region is determined. The local deviation is compared with a local deviation tolerance value. The summed local deviation is compared with a summation deviation tolerance value. This results in a defect analysis with enhanced significance, which is implementable using a metrology system in particular.