Structured-Light Semiconductor Metrology Without Angle Rotation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional ellipsometric methods are limited by fixed azimuth and incidence angles, restricting the type of information that can be obtained about semiconductor samples, and require hardware rotation of components to compensate, which is inefficient.
Innovation Solution
A semiconductor measurement apparatus using a digital light processor to generate structured light, combined with polarizers and a spectrometer, allows for measuring polarization information at various azimuth and incidence angles without physical component rotation, utilizing broadband light from ultraviolet to infrared wavelengths and generating polarization data through pattern images and slice images.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If hardware rotation of polarizer or compensator is used to measure at different azimuth and incidence angles, then measurement information completeness is improved, but device complexity and measurement time increase
Solution Approach 1:
The patent replaces the mechanical rotation system (rotating polarizer or compensator hardware) with a computational approach using a digital light processor that generates structured light patterns. This substitution eliminates the need for physical component rotation while still enabling measurements at multiple azimuth and incidence angles, thereby reducing device complexity and measurement time while maintaining measurement information completeness
Solution Approach 2:
The patent introduces dynamic structured light patterns generated by the digital light processor that can be rapidly switched between different configurations. This dynamic optical modulation allows the system to effectively sample multiple angles without mechanical movement, resolving the contradiction between information completeness and device complexity
2Adaptability or versatility
If hardware rotation components are used to compensate for fixed angle limitations, then measurement versatility is improved, but measurement time and productivity decrease
Solution Approach 1:
The patent replaces slow mechanical rotation with rapid electronic control of the digital light processor to generate different structured light patterns. This allows the system to achieve measurement versatility across multiple angles without the time penalty of physical rotation, thereby improving both adaptability and productivity
Solution Approach 2:
The patent employs periodic modulation of structured light patterns at different angles and polarizations in a systematic sequence. This periodic action allows comprehensive angular sampling to be performed efficiently through rapid sequential measurement cycles, improving measurement versatility while maintaining high productivity
3Device complexity
If fixed azimuth and incidence angles are used for light emission, then device complexity is reduced, but measurement information completeness deteriorates
Solution Approach 1:
The patent introduces structured light patterns generated by the digital light processor as an intermediary between the fixed optical components and the sample. These structured patterns encode multiple angular and polarization information channels, allowing comprehensive measurement information to be obtained without increasing the complexity of the physical optical path
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables comprehensive polarization data acquisition at all angles, improving measurement efficiency and sensitivity to 0.1 nm, overcoming structural correlation limits and providing complete angle/polarization information for structural analysis.
Implementation Method 1
a first polarizer configured to transmit the structured light
Implementation Method 2
a second polarizer configured to transmit light reflected from the sample, passing through the first polarizer
Implementation Method 3
a spectrometer configured to receive light transmitted through the second polarizer, and at least one processor configured to generate polarization data by analyzing the light received by the spectrometer
Implementation Method 4
a digital light processor configured to generate structured light based on the light emitted by the light source
Data Source
AI summary
Provided is a semiconductor measurement apparatus including a light source configured to emit light, a digital light processor configured to generate structured light based on the light emitted by the light source, a first polarizer configured to transmit the structured light, a second polarizer configured to transmit light reflected from a sample, passing through the first polarizer, a spectrometer configured to receive light transmitted through the second polarizer, and at least one processor configured to generate polarization data by analyzing the light received by the spectrometer.