STT-RAM Dual Spin Filter Nanocurrent Channel

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Solution Overview

Problem

Current STT-RAM technologies face challenges in achieving a high TMR ratio and low critical current density, which are essential for high-density memory devices, as they often result in high resistance variation and electrical breakdown, limiting their viability in gigabit-scale applications.

Innovation Solution

A dual spin filter (DSF) element is introduced, featuring a composite free layer with a nanocurrent channel (NCC) FeSiO layer sandwiched between CoFeB layers and a MgO tunnel barrier, along with a synthetic anti-ferromagnetic pinned layer configuration, to reduce the critical current density and enhance the tunnel magnetoresistive ratio.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional MTJ structures are used to achieve high TMR ratio, then tunnel magnetoresistive ratio is improved, but critical current density increases and resistance variation worsens

Engineering Contradiction:
ImproveTMR ratioVSAvoidcritical current density
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent employs a composite free layer structure consisting of CoFeB and FeSiO layers. The CoFeB layer provides high spin polarization for enhanced TMR ratio, while the FeSiO nanocurrent channel layer reduces critical current density by confining and directing current flow through specific pathways. This composite material approach resolves the contradiction by combining materials with complementary properties to achieve both high TMR ratio and low critical current density simultaneously.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The FeSiO layer introduces local quality variation within the free layer structure. By creating regions with different magnetic and electrical properties (nanocurrent channels versus matrix regions), the structure optimizes current flow paths locally. This local differentiation allows the device to achieve lower critical current density while maintaining high TMR ratio, as the current is channeled through specific high-quality pathways rather than uniformly through the entire layer.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If conventional MTJ structures are used to achieve high TMR ratio, then tunnel magnetoresistive ratio is improved, but resistance uniformity worsens

Engineering Contradiction:
ImproveTMR ratioVSAvoidresistance uniformity
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The FeSiO layer creates localized current channels with uniform properties throughout the structure. These nanocurrent channels provide consistent current flow pathways that reduce resistance variation across different devices. The local quality enhancement through FeSiO ensures that each device exhibits similar electrical characteristics, improving resistance uniformity while maintaining high TMR ratio.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The FeSiO layer acts as an intermediary between the CoFeB layers, mediating current flow and magnetic coupling. This intermediary structure provides a uniform interface that ensures consistent electrical and magnetic properties across the device, thereby improving resistance uniformity while preserving the high TMR ratio generated by the CoFeB layers.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of operation

If high current density is applied to switch magnetization, then write operation is achieved, but electrical breakdown occurs

Engineering Contradiction:
Improvewrite operationVSAvoidelectrical breakdown
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent changes the electrical parameters of the free layer by introducing FeSiO, which has different electrical conductivity characteristics compared to conventional materials. This parameter change creates nanocurrent channels that concentrate current flow, enabling magnetization switching at lower overall current densities. The FeSiO layer's specific electrical properties allow efficient spin transfer torque while preventing the high current densities that cause electrical breakdown.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The FeSiO layer serves as an intermediary that mediates between the applied current and the magnetic switching process. It transforms the current distribution pattern, creating localized channels that efficiently transfer spin angular momentum to the magnetic layers. This intermediary function enables write operations at lower current densities, preventing electrical breakdown while maintaining effective magnetization switching.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The DSF structure achieves a significant reduction in critical current density to less than 1×10^6 A/cm² and maintains a high TMR ratio, ensuring reliable read and write operations with improved thermal stability and resistance uniformity, thus addressing the limitations of prior art in STT-RAM technology.

Implementation Method 1

The tunnel barrier layer is thin enough that a current through it can be established by quantum mechanical tunneling of conduction electrons

Methodology Applied
Scientific EffectQuantum mechanical tunneling:

Implementation Method 2

spin-transfer (spin torque) magnetization switching described by C. Slonczewski in 'Current driven excitation of magnetic multilayers'

Methodology Applied
Scientific EffectSpin transfer torque:

Implementation Method 3

Both MRAM and STT-RAM have a MTJ element based on a tunneling magnetoresistance (TMR) effect wherein a stack of layers has a configuration in which two ferromagnetic layers are separated by a thin non-magnetic dielectric layer

Methodology Applied
Scientific EffectTunneling magnetoresistance (TMR) effect: Magnetoresistance

Data Source

PatentUS8726491B2Method of forming a spin-transfer torque random access memory (STT-RAM) device
Publication Date: 2014.05.20 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US8726491B2 patent drawing
  • US8726491B2 patent drawing
  • US8726491B2 patent drawing

AI summary

A dual spin filter that minimizes spin-transfer magnetization switching current (Jc) while achieving a high dR/R in STT-RAM devices is disclosed. The bottom spin valve has a MgO tunnel barrier layer formed with a natural oxidation process to achieve low RA, a CoFe/Ru/CoFeB—CoFe pinned layer, and a CoFeB/FeSiO/CoFeB composite free layer with a middle nanocurrent channel (NCC) layer to minimize Jc0. The NCC layer may have be a composite wherein conductive M(Si) grains are magnetically coupled with adjacent ferromagnetic layers and are formed in an oxide, nitride, or oxynitride insulator matrix. The upper spin valve has a Cu spacer to lower the free layer damping constant. A high annealing temperature of 360° C. is used to increase the MR ratio above 100%. A Jc0 of less than 1×106 A/cm2 is expected based on quasistatic measurements of a MTJ with a similar MgO tunnel barrier and composite free layer.