Studded Submount Structure for Precise Semiconductor Die Attach

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Solution Overview

Problem

Existing semiconductor packaging technologies face challenges in achieving uniformity, performance, and reliability due to issues such as deformation, delamination, and shifting of components during the bonding process, which affect the electrical, mechanical, and thermal properties of the semiconductor package.

Innovation Solution

The use of a submount with stud protrusions extending from its base plane towards the semiconductor die, which provides greater control during the die-attach process by allowing for precise placement and bonding of the semiconductor die using die-attach materials such as sintered metals or electroless deposited materials.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional bonding processes are used to attach semiconductor die to submount, then the die-attach process is simple, but deformation, delamination, and shifting occur during bonding affecting reliability and performance

Engineering Contradiction:
Improvedie-attach reliabilityVSAvoidsubmount structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The submount surface is segmented into multiple discrete stud protrusions rather than a continuous flat surface. Each stud protrusion acts as an independent bonding anchor point, distributing mechanical stress and preventing delamination while maintaining structural integrity during the die-attach process.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The stud protrusions are pre-formed on the submount before the semiconductor die is attached. This preliminary structural preparation provides predetermined bonding locations that guide precise die placement and ensure proper alignment, preventing shifting during bonding while simplifying the overall attachment process.

Inventive Principle:
Principle #10Preliminary action

2Manufacturing precision

If stud protrusions are added to the submount for precise die placement, then manufacturing precision improves, but the submount structure becomes more complex

Engineering Contradiction:
Improvedie placement precisionVSAvoidsubmount structure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The submount structure transitions from a uniform flat surface to a non-uniform surface with localized stud protrusions. These protrusions concentrate bonding functionality at specific locations, providing precise die placement control only where needed while maintaining simplicity in other areas of the submount structure.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The submount surface geometry is modified by changing the physical parameters of the bonding interface - adding vertical height variation through stud protrusions. This parameter change enables precise die placement control without requiring complex external positioning systems or multi-step alignment procedures.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If die-attach materials are used with stud protrusions for better control, then bond line thickness and shear strength improve, but the bonding process becomes more complex

Engineering Contradiction:
Improvebond line thickness controlVSAvoidbonding process simplicity
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The stud protrusions are designed to self-align and self-position the semiconductor die during attachment. The die naturally settles onto the protrusions, automatically establishing the correct bond line thickness and orientation without requiring complex external control systems or multi-step adjustment procedures.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The die-attach material serves as an intermediary substance that fills the spaces between and around the stud protrusions. This intermediary material bonds the die to the protrusions while accommodating slight variations in protrusion height and position, maintaining process simplicity while achieving precise bond line control.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS20250038055A1Submounts with Stud Protrusions for Semiconductor Packages
Publication Date: 2025.01.30 WOLFSPEED INC
  • US20250038055A1 patent drawing
  • US20250038055A1 patent drawing
  • US20250038055A1 patent drawing

AI summary

Semiconductor packages are provided. In one example, a semiconductor package includes a submount. The semiconductor package further includes a semiconductor die on the submount. The submount defines a base plane, and the submount includes at least one stud protrusion extending from the base plane in a direction toward the semiconductor die.