Sub-Airy Detection Device for High-Resolution Scanning Microscopy

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Solution Overview

Problem

Conventional laser scanning microscopes face challenges in achieving high-resolution imaging due to poor signal-to-noise ratio and low image acquisition speed, primarily because of the limited number of detectable photons, which restricts the ability to improve resolution beyond the diffraction limit.

Innovation Solution

The method involves using a Sub-Airy spatially resolving detection device with a fiber bundle array that redistributes detected light to a PMT array, and actively structuring the illumination point spread function through spatial phase modulation in the pupil plane, allowing for increased image recording speed and improved resolution by optimizing the point spread function for specific applications.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a point spot is imaged onto a detection plane in a diffraction-limited manner to achieve resolution increase, then resolution beyond the diffraction limit is achieved, but the signal-to-noise ratio deteriorates due to the small number of detectable photons

Engineering Contradiction:
ImproveresolutionVSAvoidsignal-to-noise ratio
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The detection device is segmented into multiple detector elements (pixels) that spatially resolve the diffraction-limited image. Each element detects photons from a specific region of the diffraction pattern, allowing the system to maintain high resolution while collecting sufficient photons across multiple elements to achieve an acceptable signal-to-noise ratio.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from single-point detection to two-dimensional spatially resolving detection. By detecting the diffraction pattern across a two-dimensional array of detector elements, the system extracts additional information dimensions that enable resolution enhancement while maintaining signal integrity through distributed photon collection.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If oversampling is used on the detector side to resolve the Airy disk structure, then resolution increase is achieved, but the image acquisition speed decreases due to the large amount of data per spot

Engineering Contradiction:
ImproveresolutionVSAvoidimage acquisition speed
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The detection process is segmented across multiple detector elements that simultaneously capture different regions of the diffraction pattern. This parallel detection approach allows the system to acquire complete spatial information in a single measurement, avoiding the need for sequential scanning and thereby maintaining high acquisition speed despite the increased data volume.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system continuously collects photon signals across all detector elements simultaneously during the scanning process. This continuous parallel detection ensures that no measurement time is lost to sequential data collection, maintaining efficient image acquisition while capturing the full diffraction pattern information needed for resolution enhancement.

Inventive Principle:
Principle #20Continuity of useful action

3Measurement precision

If the radiation intensity is distributed over the structure of the individual image, then the diffraction structure can be resolved, but the radiation intensity per pixel decreases compared to conventional pinhole detection

Engineering Contradiction:
Improvediffraction structure resolutionVSAvoidradiation intensity per pixel
Core Design Contradiction:
Measurement precisionVSIllumination intensity

Solution Approach 1:

The detection task is segmented across multiple pixels, with each pixel detecting a portion of the total radiation. While the intensity per pixel is reduced, the collective signal from all pixels preserves the overall signal-to-noise ratio and enables resolution enhancement through the spatial distribution information that would be lost in single-point detection.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention merges the signals from multiple detector elements to reconstruct the sample image with enhanced resolution. By combining the spatially distributed information from all pixels that detect portions of the diffraction pattern, the system achieves resolution beyond the diffraction limit while maintaining adequate signal intensity through signal integration.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances image recording speed and resolution by parallelizing the detection of light from a larger sample area, achieving higher signal-to-noise ratio and allowing for imaging beyond the diffraction limit without the detector limitations of conventional methods.

Implementation Method 1

actively structuring the illumination point spread function through spatial phase modulation in the pupil plane

Methodology Applied
Scientific EffectSpatial phase modulation: Phase Modulation

Implementation Method 2

Sub-Airy spatially resolving detection device with a fiber bundle array that redistributes detected light to a PMT array

Methodology Applied
Scientific EffectOptical fiber transmission: Optical Fibre

Implementation Method 3

imaging the point or line spot in a diffraction-limited manner in a single image

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentEP2860566B1High resolution scanning microscopy
Publication Date: 2022.01.26 CARL ZEISS MICROSCOPY GMBH
  • EP2860566B1 patent drawingFigure 1
  • EP2860566B1 patent drawingFigure 2~4
  • EP2860566B1 patent drawingFigure 5

AI summary

Microscope for high-resolution scanning microscopy of a sample (2), comprising an illumination device (3) for moistening the sample (2), an imaging device (4) for scanning at least one point or line spot (14) across the sample (2) and for imaging the point or line spot (14) into a diffraction-limited, stationary single image (17) at an image scale in a detection plane (18), a detector device (19) for acquiring the single image (17) in the detection plane (18) for different scan positions with a spatial resolution which, taking into account the image scale, is at least twice as large as a half-width of the diffraction-limited single image (17) in at least one extent/dimension, and an evaluation device (C) for evaluating a diffraction pattern of the single image (17) for the scan positions from data of the detector device (19) and for generating an image of the sample (17), which has a resolution,which is increased above the diffraction limit, wherein the detector device (19) comprises: a detector array (24) having pixels (25) and larger than the single image (17), and a non-imaging redistribution element (20-21; 30-34; 30-35) which is arranged upstream of the detector array (24) and which distributes the radiation from the detection plane (18) non-imagingly onto the pixels (25) of the detector array (24), wherein at least one phase mask with a laterally variable phase influence is provided in or near the objective pupil or in a plane conjugate to the objective pupil to generate a spatial distribution of the illumination light and/or detection light perpendicular to the optical axis and/or in the direction of the optical axis.