Sub-Fab Energy Control via Dynamic Capacity States
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Electronic device manufacturing sub-fabs consume large amounts of energy and produce waste heat, leading to high operational costs and environmental impact, as they are typically designed to operate in continuous high-capacity modes to handle worst-case effluent loads, even when lower capacities are sufficient.
Innovation Solution
An integrated sub-fab system that employs Ethernet and/or RS232 Serial communications to manage energy consumption, allowing sub-fab auxiliary systems to switch between energy states based on process requirements, using sensors and controllers to optimize energy use and measure consumption in real-time, while maintaining a fail-safe communication standard through heartbeat signals to ensure continuous operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If sub-fab auxiliary systems operate in continuous high-capacity modes to handle worst-case effluent loads, then reliability is improved, but energy consumption increases
Solution Approach 1:
The sub-fab auxiliary systems transition from static continuous high-capacity operation to dynamic multi-state operation. The controller receives process data from the clean room and dynamically adjusts auxiliary system capacity to match actual effluent loads, enabling operation in low-capacity, medium-capacity, or high-capacity states as needed, thereby reducing energy consumption while maintaining reliability through on-demand high-capacity operation
Solution Approach 2:
The system changes operational parameters by implementing multiple capacity states (low-capacity, medium-capacity, high-capacity) instead of continuous high-capacity operation. The controller modifies operational parameters such as pump flow rates, chiller capacity, and abatement system power levels based on actual process conditions, allowing the system to adapt energy consumption to actual needs while preserving the ability to handle worst-case scenarios
2Reliability
If sub-fab auxiliary systems operate in continuous high-capacity modes, then system reliability is improved, but operational costs increase
Solution Approach 1:
The system implements dynamic capacity adjustment where auxiliary systems operate at varying capacity levels based on actual process demands. The controller continuously monitors clean room process data and adjusts auxiliary system operation accordingly, enabling the system to maintain reliability by scaling capacity up when needed while reducing operational costs by operating at lower capacity during normal conditions
Solution Approach 2:
The system changes operational parameters by implementing multiple capacity states (low-capacity, medium-capacity, high-capacity) that directly impact operational costs. By transitioning from fixed high-capacity operation to variable capacity operation, the system reduces energy consumption and associated operational costs while preserving the ability to maintain high capacity when process conditions require it
3Reliability
If sub-fab auxiliary systems operate in continuous high-capacity modes, then system reliability is improved, but environmental impact increases
Solution Approach 1:
The system transitions from continuous high-capacity operation that generates constant waste heat to dynamic operation where auxiliary systems adjust capacity based on actual effluent loads. By operating at lower capacity during normal conditions and only scaling up when necessary, the system reduces waste heat generation while maintaining reliability through on-demand high-capacity operation
Solution Approach 2:
The system changes operational parameters by implementing multiple capacity states that directly affect waste heat generation. By operating in low-capacity or medium-capacity states during normal conditions and transitioning to high-capacity only when process conditions require it, the system reduces the generation of harmful waste heat while preserving system reliability
4Use of energy by moving object
If sub-fab systems switch between energy states based on process requirements, then energy consumption is reduced, but device complexity increases
Solution Approach 1:
The controller serves multiple functions: it receives and processes process data from the clean room, determines appropriate capacity states, controls auxiliary system operation, and manages communication protocols. This multi-functionality consolidates control logic into a single universal controller, reducing overall system complexity despite the sophisticated multi-state operation
Solution Approach 2:
The controller acts as an intermediary between the clean room process systems and the auxiliary systems. It receives process data, processes the information, and translates it into appropriate control signals for auxiliary systems, simplifying the interface and control logic while enabling sophisticated energy management through standardized communication protocols
Data Source
AI summary
Methods and apparatus for enhanced control over electronic device manufacturing systems are provided herein. In some embodiments, the integrated sub-fab system may employ Ethernet and/or RS232 Serial communications through an open platform of apparatus to achieve a reduced carbon footprint during electronic device manufacturing. For this example, the system could include a process tool set and controller linked by sensors or software interconnect with one or more sub-fab or local factory auxiliary systems that can be operated in one or more states of energy consumption. These one or more auxiliary systems can be switched between different levels of energy consumption, as required by the process, via the controller. For many auxiliary components or systems the integrated sub-fab system utilizes existing signal outputs, for others they may employ secondary sensors or monitors.