Sub-Fab Emissions Monitoring via Virtual Copy Modeling
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Solution Overview
Problem
Current methods for accurately measuring and reporting CO2 and global warming gas emissions in electronic device manufacturing are expensive, time-consuming, and require extensive resources, with high uncertainty, making it challenging to comply with regulatory requirements and assess environmental impact effectively.
Innovation Solution
An integrated sub-fab system that monitors and reports energy usage and emissions by controlling sub-fab equipment to enter energy-saving modes, such as idle, sleep, or hibernate, and calculates CO2 equivalent emissions using real-time data from sensors, providing detailed reports and statistics for compliance with emissions regulations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional emission measurement methods are used, then measurement accuracy is improved, but cost and time consumption increase significantly
Solution Approach 1:
The patent uses statistical models to create a virtual representation of emissions based on readily available process data, rather than performing actual physical measurements. This copy approach provides sufficient accuracy for tracking emissions trends and compliance without the time-consuming nature of traditional measurement methods
Solution Approach 2:
The patent replaces mechanical/physical measurement systems with computational modeling. Instead of using physical sensors and measurement equipment that require scheduling and setup time, the system uses software-based statistical models that calculate emissions from process parameters, dramatically reducing time consumption
2Measurement precision
If traditional emission measurement methods are used, then measurement accuracy is improved, but cost increases significantly
Solution Approach 1:
The patent creates a computational copy of the emissions data through statistical modeling, avoiding the need for expensive physical measurement equipment, certified specialists, and complex analytical tool sets. This approach provides sufficient accuracy for compliance and decision-making at a fraction of the cost
Solution Approach 2:
The patent uses readily available process data that already exists from normal manufacturing operations, rather than investing in expensive dedicated measurement equipment. This disposable use of existing data provides the needed emission information without significant additional cost
3Measurement precision
If emission measurements are conducted under production conditions, then data representativeness is improved, but production losses increase
Solution Approach 1:
The patent calculates emissions based on copies of existing process data from normal production operations, rather than interrupting production for physical measurements. This maintains full production throughput while providing representative emission data that reflects actual manufacturing conditions
Solution Approach 2:
The system continuously collects and stores process data during normal production, so that emission calculations can be performed immediately without needing to schedule separate measurement campaigns. This eliminates production interruptions while maintaining data quality
Data Source
AI summary
Methods and apparatus for enhanced control, monitoring and recording of incoming chemical and power use, and emissions of electronic device manufacturing systems are provided. In some embodiments, integrated sub-fab system systems may monitor the energy usage of the sub-fab equipment. The tool can enter many different depths of energy savings modes such as idle (shallow energy savings where production equipment can recover to normal production with no quality or throughput impact in seconds), sleep (deeper energy savings where production equipment can recover in minutes), or hibernate (where production equipment may require hours to recover not to have impact on quality, or throughput) for the system. In some embodiments, the system may monitor and display all gas emissions in a sub-fab as well as the Semi S23 method reporting of CO2 equivalent emission. The system may monitor effluent process gases and energy use from the process tool and sub-fab equipment.