Sublimation Drying Composition for Pattern Collapse Prevention
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Solution Overview
Problem
Conventional sublimation drying methods using a sublimable substance dissolved in a solvent often result in solvent residue on the substrate, leading to pattern collapse during the drying process.
Innovation Solution
A substrate processing method involving a liquid film formation step using a mixture of two sublimable substances in eutectic or near-eutectic composition, followed by solidification and sublimation to form a solidified film, which is then removed, thereby preventing solvent residue and pattern collapse.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a sublimable substance (camphor) is dissolved in a solvent (IPA) for sublimation drying, then the drying performance is improved, but solvent residue remains on the substrate causing pattern collapse
Solution Approach 1:
The invention extracts and eliminates the solvent component from the processing liquid, using only sublimable substances. This removes the source of solvent residue that causes pattern collapse, while maintaining the drying function through the sublimation mechanism of the pure sublimable substance composition
Solution Approach 2:
The invention uses a composite composition of multiple sublimable substances (camphor and at least one other sublimable substance) in specific ratios. This composite approach improves sublimation characteristics and drying performance while avoiding solvent residue, as both components are fully sublimable and leave no residue
2Object-generated harmful factors
If a sublimable substance is used without solvent, then solvent residue is eliminated, but the liquid film formation and solidified film properties are insufficient
Solution Approach 1:
The invention combines multiple sublimable substances in specific ratios to create a composite processing liquid that forms solidified films with improved properties. The combination of camphor with other sublimable substances optimizes the solidification characteristics and film quality without requiring solvent
Solution Approach 2:
The invention optimizes the composition ratios of sublimable substances to achieve desired solidified film properties. By adjusting the parameters of substance composition and ratios, the solidification behavior and film quality are controlled to meet manufacturing precision requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The use of a mixed sublimable substance composition suppresses solvent residue and reduces stress at grain boundaries, enhancing pattern stability, workability, and reducing energy costs while improving thickness controllability of the solidified film.
Implementation Method 1
a solidified film formation step of solidifying the liquid film of the processing liquid, to thereby form a solidified film of the sublimation drying processing agent
Implementation Method 2
a sublimation step of sublimating the solidified film, to thereby remove the solidified film from the front surface of the substrate
Data Source
AI summary
The present invention includes a liquid film formation step of supplying a processing liquid in which a sublimation drying processing agent obtained by mixing a first sublimable substance and a second sublimable substance which are different from each other in a eutectic composition or a near-eutectic composition is liquefied, onto a front surface of a substrate on which a pattern is formed, to thereby form a liquid film of the processing liquid on the front surface of the substrate, a solidified film formation step of solidifying the liquid film of the processing liquid, to thereby form a solidified film of the sublimation drying processing agent, and a sublimation step of sublimating the solidified film, to thereby remove the solidified film from the front surface of the substrate.