Submillimeter-Wave Phased Arrays With MEMS Beam Steering

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Solution Overview

Problem

Existing submillimeter-wave spectrometers and radiometers face challenges in achieving high imaging speed, reducing instrument mass and complexity, and overcoming the lack of low-loss phase-shifters for beam-scanning, which are typically achieved through mechanical scanning.

Innovation Solution

A phased array system utilizing MEMS phase shifters for electronic beam-steering, with waveguides and antennas configured for submillimeter wavelengths, enabling phase shifting and beam steering through dielectric materials in waveguides.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If mechanical scanning is used to steer the beam, then the instrument can achieve beam steering capability, but the imaging speed is slow and the instrument mass, size and complexity increase

Engineering Contradiction:
Improveimaging speedVSAvoidinstrument complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical scanning system with an electronic beam steering system using MEMS phase shifters. Instead of physically moving optical components to change beam direction, the invention uses electronic phase modulation of the submillimeter-wave signals across multiple antenna elements to achieve beam steering. This substitution eliminates mechanical moving parts, reduces instrument mass and complexity, and significantly increases imaging speed while maintaining beam steering capability

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent implements dynamic beam steering through electronic control of phase shifters rather than static mechanical positioning. The MEMS phase shifters can rapidly change phase delays in response to control signals, enabling fast beam pointing changes without mechanical inertia or friction limitations. This dynamic electronic control allows the system to adapt beam direction in real-time with microsecond response times

Inventive Principle:
Principle #15Dynamics

2Weight of moving object

If mechanical scanning components are used, then beam steering is achieved, but the instrument mass increases

Engineering Contradiction:
Improveinstrument massVSAvoidbeam steering capability
Core Design Contradiction:
Weight of moving objectVSEase of operation

Solution Approach 1:

The patent replaces heavy mechanical scanning components with lightweight electronic phase modulation circuitry. The MEMS phase shifters are miniaturized solid-state devices that weigh fractions of a gram compared to mechanical scanners. By substituting mechanical beam steering with electronic phase control across a fixed antenna array, the system achieves the same beam steering capability with dramatically reduced mass

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Loss of energy

If conventional phase shifters are used at submillimeter wavelengths, then phase shifting is achieved, but signal loss increases

Engineering Contradiction:
Improvesignal lossVSAvoidphase shifting capability
Core Design Contradiction:
Loss of energyVSAdaptability or versatility

Solution Approach 1:

The patent optimizes the physical and electrical parameters of the phase shifters for submillimeter-wave operation. The MEMS phase shifters are designed with specific geometric parameters (capacitor plate areas, gap distances, spring constants) tailored for 550 GHz operation. By carefully controlling the capacitance values and mechanical spring constants, the phase shifters achieve the required phase modulation range with minimal insertion loss, as the electrical lengths and impedance matching are optimized for the submillimeter wavelength regime

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves efficient beam scanning with reduced mass and complexity, providing high imaging speed and low-loss phase shifting, suitable for applications in remote sensing and communication systems.

Implementation Method 1

MEMS phase shifters comprising a dielectric material that is inserted in the waveguides so as to control the speed of propagation of the signal in this waveguide

Methodology Applied
Scientific EffectDielectric: Dielectric

Data Source

PatentUS12609447B2Submillimeter-wave phased arrays for electronic beam scanning
Publication Date: 2026.04.21 CALIFORNIA INST OF TECH
  • US12609447B2 patent drawing
  • US12609447B2 patent drawing
  • US12609447B2 patent drawing

AI summary

A phased array system comprising an array of antennas outputting or receiving electromagnetic radiation to or from a steerable direction, wherein the electromagnetic radiation is at submillimeter wavelengths. The system further comprises a plurality of waveguides outputting or receiving the signals to or from the antennas, each of the waveguides with individual phase tuning. The waveguides are configured and dimensioned to guide an electromagnetic wave comprising the signals having a frequency in a range of 100 gigahertz (GHz) to 1000 terahertz (THz). The system further comprises means for phase shifting the signal by means of shifting or varying one or more phases of the signals relative to one another so as to vary, steer, or scan a direction of the electromagnetic radiation.