Subpixel Photodetector Segmentation for Leakage and Cross-Talk Reduction

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Solution Overview

Problem

Photodetectors in various applications face performance degradation due to leakage current, dark current, electrical/optical cross-talk, and high power consumption, especially when used in single or array configurations for detecting optical signals beyond visible wavelengths.

Innovation Solution

A photo-detecting apparatus utilizing a germanium-based light absorption material supported by a semiconductor substrate, with strategically doped regions and metal lines to control photo-generated carriers, enabling efficient absorption of near-infrared or short-wave infrared light, and incorporating a pixel structure with subpixels and isolation regions to minimize leakage and cross-talk, while optimizing power usage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If photodetectors are used in single or array configurations to detect optical signals beyond visible wavelengths, then the detection capability for near-infrared or short-wave infrared light is improved, but leakage current, dark current, electrical/optical cross-talk, and power consumption increase

Engineering Contradiction:
Improvedetection capabilityVSAvoidleakage current and dark current
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The photodetector is divided into multiple pixels, and each pixel is further segmented into N subpixels (where N≥2). Each subpixel includes a detection region and two switches. This segmentation isolates the detection regions from each other, reducing electrical and optical cross-talk between adjacent detection elements while maintaining the ability to detect near-infrared and short-wave infrared light across the array configuration.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each subpixel is equipped with two switches that can independently control the detection regions. This local control mechanism allows for selective activation and deactivation of specific subpixels, enabling the system to minimize leakage current and dark current by keeping non-active regions in a high-impedance state while maintaining detection capability in active regions.

Inventive Principle:
Principle #3Local quality

2Adaptability or versatility

If photodetectors are used in single or array configurations to detect optical signals beyond visible wavelengths, then the detection capability for near-infrared or short-wave infrared light is improved, but electrical/optical cross-talk increases

Engineering Contradiction:
Improvedetection capabilityVSAvoidelectrical/optical cross-talk
Core Design Contradiction:
Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

The photodetector is divided into multiple pixels, and each pixel is further segmented into N subpixels (where N≥2). Each subpixel includes a detection region and two switches. This segmentation isolates the detection regions from each other, reducing electrical and optical cross-talk between adjacent detection elements while maintaining the ability to detect near-infrared and short-wave infrared light across the array configuration.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The harmful cross-talk between adjacent pixels is extracted and eliminated by introducing isolation regions between pixels. Additionally, the two-switch configuration within each subpixel allows for electrical isolation of detection regions, effectively removing the cross-talk pathway while preserving the detection function.

Inventive Principle:
Principle #2Taking out (Extraction)

3Adaptability or versatility

If photodetectors are used in single or array configurations to detect optical signals beyond visible wavelengths, then the detection capability for near-infrared or short-wave infrared light is improved, but power consumption increases

Engineering Contradiction:
Improvedetection capabilityVSAvoidpower consumption
Core Design Contradiction:
Adaptability or versatilityVSUse of energy by moving object

Solution Approach 1:

The two switches in each subpixel enable periodic or selective activation of detection regions. Instead of continuously powering all detection regions, the system can activate only the necessary subpixels for current measurement, reducing overall power consumption while maintaining detection capability for near-infrared and short-wave infrared light when needed.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

Each subpixel is equipped with two switches that can independently control the detection regions. This local control mechanism allows for selective activation and deactivation of specific subpixels, enabling the system to minimize power consumption by keeping non-active regions in a high-impedance state while maintaining detection capability in active regions.

Inventive Principle:
Principle #3Local quality

4Reliability

If pixel structure with subpixels and isolation regions is implemented, then leakage current and cross-talk are reduced, but device complexity increases

Engineering Contradiction:
Improveleakage current and dark currentVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The isolation regions are merged into the pixel structure itself, forming an integrated design where pixels contain multiple subpixels with built-in isolation. This merging approach reduces the need for separate isolation structures and simplifies the overall fabrication process while effectively reducing leakage current and cross-talk.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The two switches in each subpixel serve multiple functions: they control the detection regions, provide electrical isolation, enable selective activation, and reduce power consumption. This multi-functionality reduces the need for additional components that would otherwise be required to achieve the same effects, thereby limiting the increase in device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides high demodulation contrast, low leakage and dark currents, reduced power consumption, and efficient processing of optical signals across multiple wavelengths, suitable for time-of-flight applications, with improved chip size miniaturization and reduced electrical/optical cross-talk.

Implementation Method 1

A first germanium-based light absorption material is supported by the semiconductor substrate and configured to absorb a first optical signal having a first wavelength greater than 800 nm

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Data Source

PatentUS11482553B2Photo-detecting apparatus with subpixels
Publication Date: 2022.10.25 ARTILUX INC
  • US11482553B2 patent drawing
  • US11482553B2 patent drawing
  • US11482553B2 patent drawing

AI summary

A photo-detecting apparatus is provided. The photo-detecting apparatus includes at least one pixel, and each pixel includes N subpixels, wherein each of the subpixels comprises a detection region, two first conductive contacts, wherein the detection region is between the two first conductive contacts, wherein N is a positive integer and is ≥2.