Substance Detecting Element With Through-Hole Beams
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Solution Overview
Problem
The existing chemical sensor devices have inefficient substance adsorption due to two-dimensionally arrayed vibrators on a flat plate, which blocks airflow and hampers the detection efficiency.
Innovation Solution
A substance detecting element with through-holes and pair of orthogonal beams that allow gas with substances to pass through, featuring a substance adsorption film at the beams' coupling point, enhancing adsorption efficiency by preventing gas from remaining and allowing easy passage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If vibrators are two-dimensionally arrayed on a flat plate, then the device structure is simple, but the airflow is blocked and substance adsorption efficiency deteriorates
Solution Approach 1:
The patent transitions from a two-dimensional flat plate array to a three-dimensional structure by forming through-holes in the substrate and positioning vibrators within these holes. This dimensional change allows gas to flow through the device while maintaining vibrator arrays, resolving the conflict between structural simplicity and adsorption efficiency.
Solution Approach 2:
The substrate is designed with through-holes creating a porous structure that allows gas permeation. This enables the gas flow to pass through the device rather than being blocked by a solid flat plate, thereby improving substance adsorption efficiency while maintaining a relatively simple manufacturing process.
2Ease of manufacture
If vibrators are arranged on a flat plate, then the manufacturing process is straightforward, but gas flow is obstructed and detection efficiency decreases
Solution Approach 1:
The invention moves the vibrator arrangement from a two-dimensional surface to a three-dimensional configuration within through-holes. This allows gas to flow through the device while vibrators remain positioned for effective substance detection, improving measurement precision without significantly complicating manufacturing.
Solution Approach 2:
The substrate is segmented into multiple through-holes, each potentially containing vibrators. This segmentation allows gas flow paths to be created while maintaining discrete vibrator positions, thereby improving detection efficiency while keeping the manufacturing process relatively simple through modular construction.
3Device complexity
If a solid flat plate is used to support vibrators, then the structure is simple, but airflow passage is blocked and substance detection is inefficient
Solution Approach 1:
The solid flat plate is replaced with a porous substrate containing through-holes. This allows the structure to remain relatively simple while enabling gas flow through the device, thereby improving substance detection efficiency without significantly increasing device complexity.
Solution Approach 2:
The structure transitions from a two-dimensional flat plate to a three-dimensional configuration with through-holes. This dimensional change enables gas to pass through the substrate while vibrators are positioned within the holes, resolving the contradiction between structural simplicity and detection efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables more efficient detection of substances by allowing gas to pass through the adsorption film, improving the detection sensitivity and efficiency of the substance detecting element.
Implementation Method 1
a through-hole through which gas including a substance passes is provided with a substance adsorption film
Implementation Method 2
each of the vibrators includes a piezoelectric substrate. Application of an alternating voltage allows such piezoelectric substrates to be deformed, thereby vibrating the vibrators
Data Source
Figure 1~2
Figure 3~4
Figure 5
AI summary
A through-hole (3) is disposed in a supporting substrate (2). Plate-shaped beams (4 (4A, 4B)) each includes a piezoelectric element, extends from an edge of the through-hole (3) toward an opposite edge to close a part of the through-hole (3), supports a substance adsorption film to which a constitutive substance to be detected adheres, and has a vibration frequency that is varied due to adhesion of the constitutive substance to the substance adsorption film. Drive electrodes (16) apply a voltage to the piezoelectric element to vibrate and deform the beams (4). Detection electrodes (17) detect information about the vibration frequencies of the beams (4).