Substrate Rotation Speed Detection via Acoustic Notch Impact
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Solution Overview
Problem
Existing substrate cleaning devices that use rollers to rotate and clean semiconductor wafers face challenges in accurately measuring rotation speed due to slip between the substrate and rollers, requiring complex device configurations and increased costs when using vibration sensors.
Innovation Solution
A cleaning device equipped with a microphone to detect sounds generated when a notch on the substrate hits the rollers, allowing for accurate rotation speed calculation without complicating the device configuration, with options for microphone placement outside the housing for improved detection accuracy and reduced need for waterproofing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a vibration sensor is attached to each roller to detect vibration for rotation speed measurement, then measurement precision is improved, but device complexity and cost increase
Solution Approach 1:
The patent merges the detection function into a single location by attaching one vibration sensor to the housing that receives vibration from multiple rollers simultaneously, consolidating what would require multiple sensors into a single detection point, thereby reducing device complexity while maintaining measurement capability
Solution Approach 2:
The housing acts as an intermediary that transmits and concentrates vibration signals from multiple rollers to a single vibration sensor, enabling the sensor to detect composite vibrations that contain information about substrate rotation speed without requiring direct attachment to each roller
2Measurement precision
If a vibration sensor is used to detect rotation speed, then measurement precision is improved, but the number of components and cost increase
Solution Approach 1:
Multiple detection functions are merged into a single vibration sensor by positioning it on the housing to receive combined vibrations from all rollers, reducing the quantity of sensors from potentially multiple to just one while maintaining the ability to measure rotation speed accurately
3Measurement precision
If a vibration sensor is installed near the vibration source for accurate detection, then measurement precision is improved, but waterproofing requirements and device complexity increase
Solution Approach 1:
The housing serves as an intermediary transmission medium that conveys vibration energy from the rollers (vibration source) to the vibration sensor, allowing the sensor to be positioned on the housing rather than directly on the rollers, thereby eliminating waterproofing requirements while maintaining detection accuracy through the transmitted vibrations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed solution enables accurate and efficient measurement of substrate rotation speed with increased resolution and reduced complexity, improving detection accuracy and eliminating the need for costly vibration sensors and waterproofing.
Implementation Method 1
a microphone that detects a sound generated when a notch of the peripheral edge part of the substrate hits the plurality of rollers
Data Source
AI summary
A cleaning device includes: a plurality of rollers that hold a peripheral edge part of a substrate; a rotation driving unit that rotates the substrate by rotationally driving the plurality of rollers; a cleaning member that abuts on the substrate and cleans the substrate; a cleaning liquid supply nozzle that supplies a cleaning liquid to the substrate; a microphone that detects a sound generated when a notch of the peripheral edge part of the substrate hits the plurality of rollers; and a rotation speed calculation unit that calculates a rotation speed of the substrate on the basis of the sound detected by the microphone.