Substrate Container Adapter With Secure Side-Column Retention
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Solution Overview
Problem
Existing substrate containers are typically sized for one substrate size, such as 300 mm wafers, and adapters for accommodating different sizes like 200 mm wafers are not securely attached, leading to potential loss during processes and inconsistent indexing for automated handling.
Innovation Solution
The development of adapters that attach to side columns and internal features of substrate containers, using engagement features like springs and snap-fits, to securely hold different size substrates and facilitate automated handling, while allowing integration of sensors and environmental control modules.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If adapters are provided to accommodate different size substrates in substrate containers, then the versatility and adaptability of substrate containers are improved, but the reliability of adapter retention during processes deteriorates as adapters are not securely attached and can fall out
Solution Approach 1:
The adapter is divided into multiple functional components: engagement features (first and second engagement features) that attach to side columns, a retention feature that secures the adapter body, and a substrate holding portion. This segmentation allows each component to perform its specific function independently, ensuring both versatility and reliable retention.
Solution Approach 2:
The adapter body is configured to be received within the substrate container, with engagement features extending outward to attach to side columns. The retention feature is nested within the adapter body structure, creating a hierarchical arrangement where smaller components are integrated into larger structures, ensuring secure attachment while maintaining compact design.
2Device complexity
If simple adapters are used to reduce device complexity, then the ease of manufacture and device simplicity are improved, but the reliability of automated handling deteriorates due to inconsistent indexing of height
Solution Approach 1:
The adapter incorporates specific geometric features at critical locations: engagement features with defined shapes for consistent attachment to side columns, a retention feature with precise dimensions for reliable securing, and a substrate holding portion with standardized indexing. These localized quality enhancements ensure consistent automated handling without requiring overall system complexity.
Solution Approach 2:
The adapter design incorporates universal engagement features that can attach to standard side columns in substrate containers, while simultaneously providing substrate holding capabilities and automated handling interface. The retention feature serves multiple functions: securing the adapter body, providing height indexing, and enabling automated gripper attachment, thereby achieving reliability without proportionally increasing complexity.
3Reliability
If engagement features are added to secure adapters, then the reliability of adapter retention is improved, but the device complexity and manufacturing difficulty increase
Solution Approach 1:
The engagement features, retention feature, and substrate holding portion are merged into a single integrated adapter body structure. This consolidation allows the adapter to be manufactured as one piece or pre-assembled unit, reducing the number of separate components that need to be manufactured and assembled, thereby maintaining ease of manufacture while achieving reliable retention through multiple integrated engagement mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables secure attachment and automated handling of diverse substrates, ensuring adapters remain in place during processes like washing and allowing integration of sensors for environmental control, thus enhancing the versatility and functionality of substrate containers.
Implementation Method 1
The engagement feature includes a spring and a contact surface disposed on said spring, the contact surface configured to engage a shelf provided on a side column of the substrate container
Data Source
AI summary
Apparatuses including substrate container attachment interfaces and substrate container adapters are provided. The substrate container attachment interfaces and substrate container adapters include at least one engagement feature configured to engage with a projection or recess provided in a substrate container. Adapters can include a cassette configured to be attached to, or integrally formed including the substrate container attachment interfaces. The substrate container attachment interfaces can attach to side columns provided in substrate containers. The substrate container attachment interfaces can include or be joined to environmental adjustment packs and/or sensors. The adapters can be configured to be at predetermined heights, and the predetermined heights can be selected based on interactions with automated handling.