Substrate Chamber Air Curtain for Particle-Free Loading
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Solution Overview
Problem
Existing substrate processing apparatuses allow external air and particles to enter the chamber during loading and unloading, compromising the processing environment and leading to substrate defects.
Innovation Solution
A substrate processing apparatus that forms an air curtain at the loading/unloading part by injecting a fluid, such as clean air or inert gas, to prevent external air and particles from entering the chamber when it is open, using fluid injection parts positioned along the circumference of the flange parts and configured to inject fluid vertically or obliquely.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the chamber is opened for loading/unloading substrates, then substrate processing efficiency is improved, but external air and particles can enter the chamber compromising the processing environment
Solution Approach 1:
A fluid injection part introduces a fluid (clean air or inert gas) as an intermediary substance between the external environment and the chamber interior. This fluid forms a protective curtain that mediates the interaction between external contaminants and the chamber, allowing loading/unloading operations while preventing particle intrusion.
Solution Approach 2:
The invention utilizes pneumatic principles by injecting a fluid (gas or liquid) through the fluid injection part to create a pressurized barrier. The fluid is injected at controlled pressure and flow rates to form a stable air curtain that physically blocks external particles from entering the chamber during open-state operations.
2Manufacturing precision
If a sealed chamber is used to prevent particle introduction, then substrate cleanliness is improved, but loading/unloading operations become more complex
Solution Approach 1:
The system dynamically transitions between sealed and open states by controlling the fluid injection timing. The air curtain is activated specifically during the transition periods when the chamber is opening or closing, allowing the chamber to be fully sealed during processing operations while enabling easy access during loading/unloading without requiring complex intermediate mechanisms.
Solution Approach 2:
An inert gas or clean air is used to create a controlled atmosphere barrier at the chamber opening. This inert environment prevents external contaminants from mixing with the chamber interior during loading/unloading operations, maintaining substrate cleanliness without requiring the chamber to remain permanently sealed.
3Object-affected harmful factors
If the chamber remains sealed during loading/unloading, then particle contamination is prevented, but substrate loading/unloading cannot be performed
Solution Approach 1:
The fluid injection part is activated in advance before the chamber is fully opened during loading/unloading operations. This preliminary action establishes the protective air curtain barrier before external contaminants can enter, allowing the chamber to be opened for substrate access while maintaining contamination prevention from the outset of the opening process.
Solution Approach 2:
A fluid barrier acts as an intermediary layer between the external environment and the chamber interior during open-state operations. This mediator allows physical access for substrate loading/unloading while continuously preventing particle intrusion through the fluid curtain that fills the opening space.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The air curtain effectively blocks external air and particles, reducing substrate defects by maintaining a clean processing environment during loading and unloading operations.
Implementation Method 1
a fluid injection part configured to inject a fluid from an outer side of a loading/unloading part, by which the inside and the outside of the chamber are connected, to form an air curtain
Data Source
AI summary
The present disclosure relates to a substrate processing apparatus, and more specifically, to a substrate processing apparatus capable of blocking the introduction of external air and external particles into a chamber by forming an air curtain at a loading/unloading part when the chamber is open. The substrate processing apparatus of the present disclosure includes a chamber in which a space is formed, and a fluid injection part configured to inject a fluid from an outer side of a substrate loading/unloading part of the chamber through which a substrate is loaded and unloaded.