Substrate Alignment Calibration and Synchronization
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Solution Overview
Problem
Existing substrate processing systems face errors in precise positioning due to human error and environmental changes, such as temperature and humidity fluctuations, affecting the accuracy of component locations and substrate placement.
Innovation Solution
A method involving the calibration of a substrate alignment device with a first substrate transport apparatus and synchronization of its coordinate system with a second transport apparatus, using a computer program to adjust calibration factors and correct coordinates, ensuring precise alignment and positioning of substrates across the system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual measurement and robot teaching methods are used to determine component locations, then the system can be set up initially, but human error and environmental changes cause positioning inaccuracies to worsen over time
Solution Approach 1:
The system uses vision sensors to continuously detect substrate positions and provides feedback to the controller, which automatically adjusts robot movements to compensate for deviations, creating a closed-loop control system that maintains accuracy over time
Solution Approach 2:
The patent replaces manual mechanical measurement and teaching methods with an automated vision-based measurement system and computer-controlled robot teaching, eliminating human error and enabling consistent, repeatable positioning
2Adaptability or versatility
If the system operates in changing environmental conditions, then the apparatus remains usable, but temperature and humidity fluctuations cause dimensional changes that degrade positioning accuracy
Solution Approach 1:
The vision system dynamically adjusts measurement and compensation parameters based on real-time environmental conditions, allowing the system to adapt to temperature and humidity changes while maintaining positioning accuracy through automated calibration
3Productivity
If seals and support structures are subjected to operational stress, then the system can function under load, but compression and deformation cause component locations to drift over time
Solution Approach 1:
The system performs preliminary robot teaching and calibration procedures that account for expected stress-induced deformations, pre-compensating for location drift before production operations begin
Solution Approach 2:
The vision system continuously monitors component locations and provides feedback that enables real-time compensation for stress-induced deformations, maintaining positioning accuracy even under operational loads
Data Source
AI summary
A method for positioning substrates in a substrate processing apparatus having a substrate alignment device, a first substrate transport apparatus and a second substrate transport apparatus, includes calibrating the substrate alignment device with a motion of the first substrate transport apparatus, and calibrating a coordinate system of the second substrate transport apparatus with the substrate alignment device.