Substrate Alignment Using Distance Sensors for Wedge Error Compensation

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Solution Overview

Problem

Current methods for wedge error compensation in substrate alignment are inefficient, particularly in bonding processes, and are ineffective for non-transparent substrates as they require direct measurement of electromagnetic radiation, which is often not possible.

Innovation Solution

A device and method utilizing multiple distance sensors, including inner and outer sensors arranged in pairs, to measure distances between substrates and substrate holders, allowing for efficient wedge error compensation without direct electromagnetic radiation measurement, using interferometry and adjustable sensor positions for accurate alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If direct electromagnetic radiation measurement is used for wedge error compensation, then measurement precision is improved, but it cannot be applied to non-transparent substrates

Engineering Contradiction:

Improvewedge error measurement precisionVSAvoidapplicability to non-transparent substrates

Core Design Contradiction:

Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent introduces substrate holder surfaces as intermediary measurement targets. Instead of measuring the substrate directly (which fails for non-transparent materials), the system measures the distance between distance sensors and the substrate holder surfaces, which are always accessible and measurable. This intermediary approach allows wedge error compensation for both transparent and non-transparent substrates.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces optical measurement methods (electromagnetic radiation) with mechanical distance measurement using distance sensors. This substitution enables measurement of non-transparent substrates by measuring the mechanical distance to the substrate holder surface rather than relying on optical penetration through the substrate.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If conventional wedge error compensation methods are used, then alignment accuracy is improved, but processing speed deteriorates

Engineering Contradiction:

Improvesubstrate alignment accuracyVSAvoidprocessing speed

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The patent performs preliminary measurement of distances between distance sensors and substrate holder surfaces before the actual substrate processing. This preliminary action allows the system to pre-calculate compensation values and rapidly apply them during substrate processing, improving throughput while maintaining alignment accuracy.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system uses the substrate holder surfaces themselves as the measurement reference, eliminating the need for separate reference standards or complex measurement setups. The substrate holder serves its dual function of holding the substrate and providing the measurement reference surface, streamlining the process.

Inventive Principle:

Principle #25Self-service

3Device complexity

If single position measurement is used, then device complexity is reduced, but wedge error compensation capability is lost

Engineering Contradiction:

Improvemeasurement system complexityVSAvoidwedge error compensation capability

Core Design Contradiction:

Device complexityVSMeasurement precision

Solution Approach 1:

The patent places multiple distance sensors at different positions on the substrate holder. Each sensor measures the local distance to the substrate holder surface at its specific location. This distributed measurement approach enables detection of wedge errors across different regions of the substrate holder, providing the capability to compensate for non-parallelism while keeping each individual sensor simple.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables rapid and accurate wedge error compensation for both transparent and non-transparent substrates, improving processing speed and efficiency in substrate alignment and bonding processes.

Implementation Method 1

The measurement takes place through one of the two transparent substrates. The central idea behind WO2012028166A1 consists in compensating for the wedge error between the substrate surfaces on which the embossing structures are located.

Methodology Applied

Scientific EffectInterferometry: Interference

Implementation Method 2

the first substrate holder comprises at least three outer distance sensors for measuring second distances to the second substrate holder surface of the second substrate holder

Methodology Applied

Scientific EffectDistance measurement:

Data Source

PatentUS12199062B2Device and method for the alignment of substrates

Publication Date: 2025.01.14 EV GRP E THALLNER GMBH

AI summary

The invention relates to a device and a method for the alignment of substrates.