Substrate Alloy Compensation for Position-Specific X-Ray Gauging
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Solution Overview
Problem
Industrial X-ray measurement techniques for material thickness gauging are compromised by substrate variations due to filler materials used to repair damaged surfaces, leading to inaccurate X-ray signal detection.
Innovation Solution
A method to compensate for substrate variation by determining position-dependent compensation parameters, including normalization, temperature, and spectral adjustments using a database of parameters stored in non-volatile memory, which are established through specific measurement protocols for each position on the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If filler materials are used to repair damaged substrate surfaces, then the substrate can be restored and continue to be used, but the X-ray measurement accuracy deteriorates due to signal absorption and scattering changes
Solution Approach 1:
The system performs preliminary characterization of the substrate surface by measuring X-ray signals at multiple positions before actual material measurement. Compensation parameters are pre-calculated and stored in a database, allowing the system to account for filler material effects during subsequent measurements without interrupting the repair process or requiring re-calibration after each repair.
Solution Approach 2:
The invention changes the measurement parameters by taking X-ray signals at multiple different positions on the substrate surface rather than a single position. By varying the measurement positions and using multiple parameters (signal intensities at different locations), the system can distinguish between substrate variations caused by filler materials and actual material thickness variations, thereby maintaining measurement accuracy despite the presence of repair materials.
2Device complexity
If the substrate surface is assumed to be smooth with uniform coating, then the measurement process is simplified, but measurement accuracy deteriorates when filler materials are present
Solution Approach 1:
The system applies local quality by treating different positions on the substrate surface differently. Instead of assuming uniform properties across the entire substrate, the invention measures and characterizes each position individually, creating position-specific compensation parameters. This allows the system to account for local variations caused by filler materials while maintaining a relatively simple overall measurement process.
3Measurement precision
If multiple measurement positions are used to capture substrate variations, then measurement accuracy improves, but the measurement time and data processing complexity increase
Solution Approach 1:
The system performs preliminary measurements at multiple positions to build a compensation parameter database during setup or maintenance periods. Once this database is established, actual production measurements can be performed quickly by referencing the pre-calculated compensation parameters, thereby minimizing the time loss during critical measurement processes while still achieving high accuracy through multi-position data.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances measurement accuracy by correcting for substrate-induced signal changes, ensuring precise determination of material quantity across the substrate surface.
Implementation Method 1
X-ray scattering and X-ray fluorescence (XRF) analysis are used in a variety of non-contact industrial process measurements
Implementation Method 2
X-ray scattering and X-ray fluorescence (XRF) analysis are used in a variety of non-contact industrial process measurements
Implementation Method 3
The filler materials may absorb an XRF signal or provide additional XRF signal, for instance and change the spectra thereby
Data Source
AI summary
A method for compensating for substrate variation in measurement of material quantity of a material positioned on a substrate is described. The method includes receiving a detected X-ray signal for a measurement of the material at a position on a surface of the substrate; and determining a material quantity based on the received X-ray measurement signal and a pre-determined set of compensation parameters for the substrate, the set of compensation parameters varying according to the position on the surface of the substrate.