Automated Local Substrate Analysis Nozzle for ICP-MS
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Solution Overview
Problem
Existing substrate analysis methods, such as ICP-MS, require manual handling and are prone to external contamination and inefficiencies in liquid collection and analysis, limiting the detection of minute impurity elements on semiconductor wafers.
Innovation Solution
An automated analysis apparatus with a nozzle system that supplies and collects analysis liquid using separate channels for precise local analysis, incorporating a nebulizer for negative pressure suction and an inductively coupled plasma mass spectrometry system for simultaneous analysis, reducing the quantity of analysis liquid needed and preventing overflow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual handling is used for ICP-MS analysis, then the analysis process is simple to operate, but external contamination occurs and analysis efficiency is low
Solution Approach 1:
The apparatus divides the analysis system into separate functional modules: a liquid supply unit that provides analysis liquid, a collection unit that gathers liquid from the substrate, and an ICP-MS analysis unit that analyzes the collected liquid. This segmentation eliminates manual handling between steps, preventing external contamination while maintaining operational simplicity through automated fluid transfer pathways.
Solution Approach 2:
Analysis liquid serves as an intermediary medium that transfers impurity elements from the substrate surface to the ICP-MS analysis unit. The liquid continuously flows through the system, carrying dissolved impurities without requiring manual intervention, thus preventing contamination while enabling automated analysis.
2Reliability
If large quantity of analysis liquid is used, then complete collection of impurity elements is achieved, but precision is reduced and overflow occurs
Solution Approach 1:
The collection unit is designed to continuously monitor and collect liquid that has contacted the substrate surface, providing feedback on the amount of liquid used. This feedback mechanism allows the system to optimize the liquid quantity, using just enough to dissolve and collect impurity elements without excess that would reduce precision or cause overflow.
Solution Approach 2:
The system controls the flow rate and volume of analysis liquid as adjustable parameters. By optimizing these parameters, the apparatus achieves complete collection of impurity elements with minimal liquid quantity, maintaining high analysis precision while preventing overflow through precise parameter management.
3Loss of information
If local analysis is performed on substrate, then impurity distribution position can be specified, but the apparatus requires complex structure for automated analysis
Solution Approach 1:
The apparatus segments the substrate analysis process into discrete local regions, analyzing impurity distribution at specific positions rather than treating the entire substrate uniformly. This segmentation enables precise mapping of impurity locations while using a relatively simple automated liquid transfer system that moves collection points across different substrate regions.
Solution Approach 2:
The automated liquid supply and collection system serves multiple functions: it supplies analysis liquid to various substrate locations, collects liquid from different regions, and transfers samples to the ICP-MS unit. This multi-functionality achieves comprehensive local analysis capability without requiring separate complex apparatus for each function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-precision detection of trace elements down to 10^8 atoms/cm^2 or less, automating the analysis process and reducing the amount of analysis liquid required, thereby improving precision and efficiency.
Implementation Method 1
a nebulizer that sucks the analysis liquid including the object to be analyzed, in the nozzle for local analysis by negative pressure
Implementation Method 2
an inductively coupled plasma mass spectrometry apparatus that analyzes the object to be analyzed included in the analysis liquid fed from the nebulizer
Implementation Method 3
inductively coupled plasma mass spectrometry (ICP-MS) apparatus
Data Source
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AI summary
An object of the present invention is to provide an analysis apparatus in which local analysis of a substrate with ICP-MS is automated. The present invention relates to an automatic analysis apparatus for a local region of a substrate, including: a nozzle for local analysis having: analysis-liquid supply means that ejects analysis liquid onto a substrate; analysis-liquid discharge means that takes the analysis liquid including an object to be analyzed from the substrate into the nozzle to feed the analysis liquid to a nebulizer; and exhaust means including an exhaust channel in the nozzle; automatic liquid-feed means that automatically feeds the collected analysis liquid to ICP-MS; flow adjustment means that adjusts the flow of the analysis liquid; and automatic control means that simultaneously performs local analysis and analysis of the object to be analyzed with the ICP-MS to perform automatic analysis to a plurality of adjacent predetermined regions, successively.