Nozzle for Substrate Analysis with Inert Gas Sealing

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Solution Overview

Problem

Nozzles used for analyzing substrates with high hydrophilicity tend to leak analysis liquid during scanning, and existing solutions require complex pressure control mechanisms to prevent droplet fall, which complicates the apparatus and is difficult to manage.

Innovation Solution

A nozzle with a double pipe structure and a gas spraying pipe on the outer periphery that sprays an inert gas parallel to the substrate surface to prevent analysis liquid leakage, eliminating the need for complex pressure adjustment mechanisms.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a large number of ions are introduced into the mass spectrometer, then the signal strength is improved, but the background noise increases and measurement precision deteriorates

Engineering Contradiction:
Improvemeasurement precisionVSAvoidion quantity
Core Design Contradiction:
Measurement precisionVSQuantity of substance

Solution Approach 1:

The ion introduction process is segmented into two distinct pathways: a first ion source introduces ions at a lower rate for background reduction, while a second ion source introduces ions at a higher rate for signal enhancement. This segmentation allows independent optimization of each ion source's contribution to resolve the contradiction between signal strength and background noise.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A reflectron (reflecting ion mirror) is introduced as an intermediary component between the ion sources and the detector. The reflectron corrects ion energy dispersion and focuses ions, thereby improving measurement precision without requiring an increase in ion quantity that would elevate background noise.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If conventional ion sources are used to introduce ions, then ion introduction is achieved, but background noise increases and measurement precision deteriorates

Engineering Contradiction:
Improvemeasurement precisionVSAvoidbackground noise
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The ion introduction function is segmented between two ion sources with different characteristics: a first ion source operating at lower ion flux to minimize background noise, and a second ion source at higher ion flux for sufficient signal strength. This segmentation resolves the contradiction by distributing the ion introduction task across multiple sources with optimized individual contributions.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The ion flux parameter is differentiated between the two ion sources, with the first source operating at a lower ion flux level and the second source at a higher ion flux level. This parameter differentiation allows the system to achieve sufficient signal strength while keeping background noise from any single source at acceptable levels.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If ion energy dispersion occurs, then ion detection is affected, but measurement precision deteriorates

Engineering Contradiction:
Improvemeasurement precisionVSAvoidion energy distribution
Core Design Contradiction:
Measurement precisionVSStability of the object's composition

Solution Approach 1:

A reflectron (reflecting ion mirror) is introduced as an intermediary component to correct ion energy dispersion. The reflectron refocuses ions with different energies, compensating for energy distribution variations and improving measurement precision without requiring changes to the ion sources themselves.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The nozzle effectively prevents analysis liquid leakage during scanning, even at higher speeds, and is suitable for substrates with high hydrophilicity, enhancing analysis efficiency and reducing apparatus costs.

Implementation Method 1

a first ion source of the mass spectrometer is introduced into the opening of the nozzle

Methodology Applied
Scientific EffectIon introduction:

Data Source

PatentEP3351922B1Method for analysis of a substrate using a nozzle
Publication Date: 2021.08.11 IAS LIMITED
  • EP3351922B1 patent drawingFigure 1
  • EP3351922B1 patent drawingFigure 2
  • EP3351922B1 patent drawingFigure 3A~3B

AI summary

Provided is a nozzle for substrate analysis with a simple structure, which enables analysis to be reliably performed without leaking an analysis liquid when a substrate having high hydrophilicity is scanned with the analysis liquid. The nozzle for analysis of a substrate according to the present invention includes: a double pipe including a nozzle main body that discharges and suctions an analysis liquid, and an outer pipe disposed on the outer periphery of the nozzle main body so as to surround the scanning analysis liquid; exhaust means having an exhaust path between the nozzle main body and the outer pipe; and a gas spraying pipe for spraying an inert gas to the tip of the nozzle main body in a direction substantially parallel to a substrate surface, the gas spraying pipe being disposed on the outer periphery of the tip of the outer pipe and on a side opposite to a scanning direction of the nozzle.