Substrate Transport Arm With Independent Wrist Joints
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Solution Overview
Problem
Existing substrate transport systems face challenges in routing electrical wires and pneumatic lines to multiple independently rotatable end effectors due to relative motion and wrist pivot joint complexities, leading to issues like wire twisting and pneumatic line kinking, which increases manufacturing and operational costs.
Innovation Solution
A substrate transport system with a channel-shaped forearm structure allows direct routing of wires and pneumatic lines to each end effector, decoupling the spacing between stacked end effectors from height build-up and accommodating pass-through instrumentation, enabling independent rotation and efficient routing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple end effectors are coaxially stacked at a common wrist joint with wires and pneumatic lines routed through the stack, then the substrate transport apparatus can hold and manipulate multiple substrates, but electrical wire twisting and pneumatic line kinking occur due to relative motion between end effectors
Solution Approach 1:
The patent divides the common wrist joint into multiple independent wrist joints, one for each end effector. This segmentation allows each end effector to rotate independently without causing wire twisting or pneumatic line kinking, as each has its own dedicated rotation axis and routing path for connections.
Solution Approach 2:
The patent transitions from a single common wrist joint (one-dimensional rotation) to multiple distributed wrist joints (multi-dimensional independent rotation). This dimensional change enables each end effector to rotate on its own axis without interfering with others, eliminating the wire and line issues associated with stacked coaxial joints.
2Ease of operation
If slip rings and rotational electrical/pneumatic couplings are used to enable end effector rotation, then continuous rotation is possible, but manufacturing and operational costs increase
Solution Approach 1:
The patent extracts the rotation capability from complex slip ring and rotational coupling mechanisms and implements it through simpler independent wrist joints for each end effector. This eliminates the need for expensive slip rings and rotational couplings, reducing both manufacturing and operational costs while maintaining full rotation capability.
Solution Approach 2:
Each end effector is equipped with its own independent wrist joint and drive mechanism, allowing it to rotate autonomously without requiring complex shared rotational coupling systems. This self-service approach simplifies the overall structure and reduces dependency on expensive rotational electrical/pneumatic couplings.
3Volume of moving object
If end effectors are stacked coaxially at a common wrist joint, then space is efficiently utilized, but routing wires and pneumatic lines becomes costly and difficult due to relative motion requirements
Solution Approach 1:
The patent segments the coaxial stack into multiple independent wrist joints distributed along the arm structure. Each segment (end effector) has its own rotation axis and connection routing, eliminating the complexity of routing wires and pneumatic lines through a stacked common wrist joint while maintaining spatial efficiency.
Solution Approach 2:
The patent redistributes wrist joints from a single common location to multiple locations along the arm structure. This dimensional redistribution allows wires and pneumatic lines to be routed independently to each end effector without the complexity of passing through stacked joints, reducing routing complexity while preserving compact design.
Data Source
AI summary
A substrate transport apparatus including a frame, an upper arm rotatably mounted to the frame about a shoulder axis, a forearm rotatably mounted to the upper arm about an elbow axis where the forearm includes stacked forearm sections dependent from the upper arm through a common joint, and independent stacked end effectors rotatably mounted to the forearm, the forearm being common to the independent stacked end effectors, wherein at least one end effector is mounted to the stacked forearm sections at a wrist axis, where the forearm is configured such that spacing between the independent stacked end effectors mounted to the stacked forearm sections is decoupled from a height build up between end effectors accommodating pass through instrumentation.