Substrate Transport Arms With Mechanical Switching and Fewer Motors
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Solution Overview
Problem
Conventional multiple arm substrate transport apparatuses require complex motor arrangements, leading to increased control system burden, potential motor failures, and higher costs, while also occupying excessive space in substrate processing chambers, limiting the integration of other components like vacuum pumps.
Innovation Solution
A substrate transport apparatus with independently controllable motors and a mechanical motion switch mechanism, allowing two or more arms to have combined rotational and independent pick/place motion using as few as two motors, with the drive integrated into the vacuum transport chamber walls, enabling the integration of vacuum system components at the bottom of the chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional multiple arm substrate transport apparatus uses three or more motors configured in coaxial manner, then the transport can achieve three degrees of freedom movement, but the control system burden increases and the potential for motor failure increases
Solution Approach 1:
The patent combines multiple motor functions into a single motor by integrating a mechanical switch mechanism that routes the motor's rotational output to different arms sequentially. The single motor alternately drives the first arm and second arm through the mechanical switch, eliminating the need for multiple independent motors while maintaining the capability to move multiple arms with three degrees of freedom.
Solution Approach 2:
The mechanical switch mechanism dynamically redirects the motor's power output between different arms based on operational requirements. The switch can rotate to connect the motor to either the first arm or the second arm, enabling flexible and dynamic control of arm movement without requiring separate dedicated motors for each arm.
2Adaptability or versatility
If conventional multiple arm substrate transport apparatus uses three or more motors, then the transport can achieve three degrees of freedom movement, but the cost of the transport increases
Solution Approach 1:
The patent merges the functions of three or more motors into a single motor system by using a mechanical switch mechanism. This consolidation reduces the bill of materials, manufacturing costs, and assembly complexity while preserving the full three degrees of freedom movement capability across multiple arms.
3Adaptability or versatility
If conventional transport apparatus and drive system are located within the chamber, then the space available for other substrate processing components is limited, but the transport can be integrated into the chamber structure
Solution Approach 1:
The patent extracts the drive system from the chamber interior and relocates it to the chamber wall or exterior. The mechanical switch mechanism and motor are positioned outside the vacuum chamber volume, allowing the chamber interior to be fully available for substrate processing components while the transport arms still operate within the chamber through the wall-mounted drive mechanism.
Data Source
AI summary
A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.