Substrate Treating Apparatus Blocking Plate Contamination Control
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Solution Overview
Problem
Existing substrate treating apparatuses face challenges in preventing contamination of substrates during inspection processes and in efficiently evacuating the atmosphere within the chamber.
Innovation Solution
The apparatus includes a housing with a compartment plate dividing the interior space into a treatment space and a drive space, an exhaust port connected to the drive space to exhaust the atmosphere, and a support unit with a blocking plate that overlaps the opening between the treatment and drive spaces, preventing atmospheric contamination and facilitating smooth evacuation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the support unit moves in a direction away from the exhaust port during inspection, then the inspection process can be completed, but the atmosphere from the drive space enters the treatment space and contaminates the substrate
Solution Approach 1:
A blocking plate is introduced as an intermediary element between the drive space and treatment space. The blocking plate selectively blocks the opening based on the support unit's position, preventing atmospheric contamination when the support unit is away from the exhaust port while allowing normal operation when needed.
Solution Approach 2:
The blocking plate is made movable and is driven by the support unit's movement. When the support unit moves away from the exhaust port, the blocking plate automatically blocks the opening to prevent contamination. When the support unit returns, the blocking plate moves to allow normal operation, creating a dynamic response to operational conditions.
2Reliability
If the exhaust port is positioned away from the first position, then atmospheric evacuation is improved, but the structure becomes more complex requiring additional blocking mechanisms
Solution Approach 1:
The blocking plate serves multiple functions: it blocks atmospheric contamination during inspection, and it also facilitates the evacuation process by controlling airflow paths. This multi-functionality reduces the need for separate complex mechanisms while maintaining reliable atmospheric evacuation.
Data Source
AI summary
Disclosed is an apparatus for treating a substrate, the apparatus including: a housing having an entrance through which a substrate is loaded, and having an interior space; a support unit for supporting the substrate in the interior space; and a drive unit for moving the support unit between a first position and a second position; a compartment plate for dividing the interior space into a treatment space and a drive space, and having an opening formed while extending from the first position toward the second position; and an exhaust port connected to the drive space to exhaust an atmosphere in the drive space, and provided to be more adjacent to the second position than to the first position, in which the support unit includes: a support plate which is positioned in the treatment space, and on which the substrate is placed; a support shaft supporting the support plate, and extending from the treatment space to the drive space through the opening; and a blocking plate positioned to overlap the opening when viewed from above, and disposed toward the first position with respect to the support shaft.