Reconstructed Package Substrate Blocks for Low-Warpage Fan-Out Packaging

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Solution Overview

Problem

Conventional package substrate packaging processes face challenges with warpage and yield loss due to the large size of package substrates, which limits the number of layers that can be incorporated without causing structural issues.

Innovation Solution

The process involves singulating a package substrate strip into discrete substrate blocks, encapsulating them in an encapsulant, forming a fan-out redistribution structure, and bonding device dies over the reconstructed package substrate, thereby reducing warpage and increasing layer density without yield loss.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the package substrate size is increased to accommodate more device dies, then the packaging capacity is improved, but warpage and yield loss increase due to structural instability

Engineering Contradiction:
Improvenumber of device dies packagedVSAvoidstructural stability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The package substrate is divided into multiple substrate blocks that are processed and assembled separately. Each substrate block maintains structural stability while the overall package capacity is increased by combining multiple blocks, thus resolving the contradiction between packaging capacity and structural stability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The package structure transitions from a single-plane substrate to a multi-layer stacked architecture with substrate blocks arranged in vertical layers. This dimensional change allows increased packaging capacity without compromising the structural integrity of individual substrate blocks.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Device complexity

If the package substrate size is increased to fit more layers, then the layer density is improved, but warpage occurs due to large substrate dimensions

Engineering Contradiction:
Improvenumber of layersVSAvoidsubstrate warpage
Core Design Contradiction:
Device complexityVSShape

Solution Approach 1:

The substrate is segmented into smaller substrate blocks that can support more layers without experiencing warpage. Each block's reduced dimensions maintain structural stability while the overall package achieves higher layer density through vertical stacking of multiple blocks.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The package architecture moves from horizontal expansion to vertical stacking, organizing substrate blocks in multiple layers. This enables increased layer density while each individual block maintains a manageable size that prevents warpage.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of manufacture

If conventional packaging processes are used with large substrates, then the manufacturing process is simple, but yield loss increases due to warpage

Engineering Contradiction:
Improvepackaging process simplicityVSAvoidyield rate
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The manufacturing process is segmented into modular steps: substrate block fabrication, encapsulation, and assembly. Each module can be optimized independently, maintaining ease of manufacture while improving yield through reduced warpage in smaller substrate blocks.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Substrate blocks are pre-fabricated and encapsulated with molding compound before final assembly. This preliminary action stabilizes the substrate structure early in the process, preventing warpage-related yield loss in subsequent manufacturing steps while maintaining overall process simplicity.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS11842935B2Method for forming a reconstructed package substrate comprising substrates blocks
Publication Date: 2023.12.12 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11842935B2 patent drawing
  • US11842935B2 patent drawing
  • US11842935B2 patent drawing

AI summary

A method includes forming a reconstructed package substrate, which includes placing a plurality of substrate blocks over a carrier, encapsulating the plurality of substrate blocks in an encapsulant, planarizing the encapsulant and the plurality of substrate blocks to reveal redistribution lines in the plurality of substrate blocks, and forming a redistribution structure overlapping both of the plurality of substrate blocks and encapsulant. A package component is bonded over the reconstructed package substrate.