Substrate Bowl Discharge Separation for Mixed Cleaning Liquids

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing substrate processing apparatuses in EUV photo track equipment fail to effectively separate and discharge chemical solutions with different physical properties, leading to contamination and increased process time due to mixed solvent discharge.

Innovation Solution

A substrate processing apparatus with a multi-stage bowl structure and movable discharge separation plate, which forms distinct discharge paths for chemical solutions with different physical properties, allowing for separate collection and discharge without mixing, utilizing a discharge guide plate and separation plate with specific surface properties to facilitate smooth and quick discharge.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If chemical solutions with different physical properties are discharged together, then the discharge process is simple, but the chemical solutions mix and cause contamination

Engineering Contradiction:

Improvedischarge process complexityVSAvoidchemical solution contamination

Core Design Contradiction:

Device complexityVSObject-affected harmful factors

Solution Approach 1:

The discharge system is segmented into multiple independent discharge paths (first discharge path and second discharge path) that physically separate chemical solutions with different physical properties. The bowl structure is divided into inner collection portion and outer collection portion, each receiving and discharging specific chemical solutions through dedicated paths, preventing mixing and contamination.

Inventive Principle:

Principle #1Segmentation

2Reliability

If multiple cleaning liquids are used sequentially, then cleaning effectiveness is improved, but process time increases

Engineering Contradiction:

Improvecleaning effectivenessVSAvoidprocess time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The system enables continuous cleaning operations by allowing multiple cleaning liquids to be applied sequentially without interruption. The separate discharge paths ensure that each cleaning liquid can be discharged immediately after use without waiting for previous liquids to clear, maintaining continuous productive action while achieving effective multi-stage cleaning.

Inventive Principle:

Principle #20Continuity of useful action

3Loss of substance

If chemical solutions are collected separately, then solvent recovery is improved, but equipment complexity increases

Engineering Contradiction:

Improvesolvent recoveryVSAvoidequipment configuration

Core Design Contradiction:

Loss of substanceVSDevice complexity

Solution Approach 1:

The system merges the collection and discharge functions into a unified bowl structure that integrates inner and outer collection portions with corresponding discharge paths. This combined structure achieves separate chemical solution recovery without requiring entirely separate collection systems, reducing overall equipment complexity while maintaining effective solvent separation and recovery.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient separation and recovery of chemical solutions with different properties, reducing process time, minimizing solvent consumption, and simplifying equipment configuration for improved productivity and compact design.

Implementation Method 1

a discharge separation plate provided movable upward and downward within the receiving space of the bowl structure, wherein when the discharge separation plate is in a first position the discharge separating and the discharge guide plate together form a first discharge path through which the first cleaning liquid scattered from the substrate is collected in the outer collection portion, and when the discharge separation plate in a second position the discharge separating and the discharge guide plate together form a second discharge path through which the second cleaning liquid scattered from the substrate is collected in the inner collection portion

Methodology Applied

Scientific EffectPhysical separation through movable plate positioning:

Implementation Method 2

a bowl structure disposed around the substrate support, the bowl structure configured to provide an annular shaped accommodating space for accommodating a chemical solution scattered from the substrate

Methodology Applied

Scientific EffectGravitational settling: Gravitation

Data Source

PatentUS11923209B2Substrate processing apparatus and substrate processing method

Publication Date: 2024.03.05 SAMSUNG ELECTRONICS CO LTD

AI summary

A substrate processing apparatus includes a substrate support configured to support and rotate a substrate, at least one first lower cleaning nozzle configured to spray a first cleaning liquid on a lower surface of the substrate, at least one second lower cleaning nozzle configured to spray a second cleaning liquid on the lower surface of the substrate, a bowl assembly disposed around the substrate support, the bowl assembly including a cup body providing an annular shaped accommodating space and inner and outer collection portions sequentially arranged in a radial direction in a lower portion of the cup body, an annular shaped discharge guide plate disposed in the receiving space of the bowl assembly under the substrate and extending outwardly from a circumference of the substrate, and a discharge separation plate provided within the receiving space of the bowl assembly to be movable upward and downward.