Substrate Cleaning Brush With Graded Protrusions for Uniform Cleaning
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Solution Overview
Problem
Existing substrate cleaning technologies face challenges in achieving uniform cleaning and maintaining durability, particularly in semiconductor manufacturing processes where non-uniform cleaning can damage integrated patterns on substrates.
Innovation Solution
A substrate cleaning brush with a cylindrical core and a brush featuring a center region and edge regions, where the protrusion ratio of protruding portions increases linearly from the center to the edge regions, and the width of these protruding portions is larger at the bottom level than at the top level, ensuring uniform cleaning and improved durability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional brush with uniform protruding portions is used, then the brush structure is simple, but the cleaning uniformity across the substrate is poor
Solution Approach 1:
The brush is designed with non-uniform protruding portions where the height, density, or shape of bristles varies across different regions of the brush head. This local variation in brush properties allows different zones to compensate for pressure distribution differences, ensuring uniform cleaning across the entire substrate surface while maintaining a relatively simple overall brush structure.
2Productivity
If the brush applies strong cleaning force, then cleaning effectiveness is improved, but durability of the brush decreases
Solution Approach 1:
The brush design incorporates varying parameters such as bristle hardness, length, or density across different regions of the brush head. Softer or shorter bristles are positioned in high-stress areas to reduce wear and extend durability, while harder or longer bristles are placed in areas requiring stronger cleaning force, thus maintaining cleaning effectiveness while improving overall brush durability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The brush design ensures consistent cleaning ability across the substrate, preventing damage to integrated patterns while enhancing the brush's durability, thereby improving the efficiency and reliability of the cleaning process.
Implementation Method 1
a substrate cleaning brush includes: a core portion having a cylindrical shape; a brush on the core portion
Implementation Method 2
a plurality of protruding portions on the brush, wherein a protrusion ratio of the plurality of protruding portions increases linearly from the center region to the edge regions
Data Source
AI summary
Provided is a substrate cleaning brush and a substrate cleaning apparatus including same. The substrate cleaning brush includes: a core portion having a cylindrical shape; a brush on the core portion, the brush including a center region and edge regions, wherein the edge regions are on opposite side of the center region; and a plurality of protruding portions on the brush, wherein a protrusion ratio of the plurality of protruding portions increases linearly from the center region to the edge regions, and wherein a width of a bottom level of at least one of the plurality of protruding portions is larger than a width of a top level of the at least one of the plurality of protruding portions.