Substrate Cleaning Brush Storage and Wetting Mechanism
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Solution Overview
Problem
Existing substrate processing apparatuses face inefficiencies in cleaning tool replacement and pre-processing, leading to prolonged downtime and reduced operating efficiency.
Innovation Solution
A substrate processing apparatus is designed with a cleaning tool holder that can quickly switch between two cleaning tools, with a storage part maintaining the second cleaning tool in a wet state, thereby reducing the time needed for tool replacement and resumption of cleaning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a brush is replaced after cleaning, then the cleaning tool is renewed, but the brush must be pre-wetted which reduces operating efficiency
Solution Approach 1:
The patent applies preliminary action by pre-wetting the backup brush before it is needed. The brush holding frame includes a liquid supply mechanism that automatically wets the backup brush during storage, so when the brush is quickly swapped during operation, it is already in the proper wet state for immediate use, eliminating the time-consuming pre-wetting step that previously reduced operating efficiency
2Adaptability or versatility
If multiple brushes are stored for replacement, then brush replacement is enabled, but the apparatus complexity increases
Solution Approach 1:
The patent merges the brush storage function with the liquid supply function into an integrated brush holding frame. The liquid supply mechanism is built into the holding frame structure, combining what would otherwise be separate systems (brush storage and wetting). This integration enables brush replacement capability while minimizing additional complexity by consolidating functions into a unified component
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly shortens the time from cleaning tool replacement to resumption of the cleaning process, enhancing operational efficiency by eliminating the need for pre-wetting the new brush.
Implementation Method 1
the cleaning tool storage part is configured to maintain the cleaning surface of the second cleaning tool temporarily stored in a state of being wetted with the processing liquid supplied from the processing liquid supply part
Data Source
AI summary
A substrate processing apparatus includes a substrate holding device, a brush arm, a plurality of brush devices, a brush storage device, and a brush liquid supply system. The tip portion of the brush arm is configured as a brush holder to which the brush device can be attached and detached. A substrate held by the substrate holding device is cleaned with the brush device. The brush storage device stores unprocessed brush devices. The used brush device is removed from the brush holder. An unprocessed brush device stored in the brush storage device is attached to the brush holder. The brush storage device is configured so that a cleaning surface of the stored brush device is maintained in a state of being wetted with a processing liquid supplied from the brush liquid supply system.