Substrate Bubble Flow Layout to Suppress Tank Downflow
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Solution Overview
Problem
The existing substrate processing apparatuses face challenges in uniformly supplying bubbles to the substrate due to the generation of downflows in the processing tank, which hinders the ascent of bubbles and reduces processing quality.
Innovation Solution
The apparatus includes a processing tank with a substrate holder that immerses the substrate in a processing liquid, a processing liquid discharger that directs the liquid to flow toward the inner bottom surface of the tank, and a bubble supplier that splits the upward flow of processing liquid into multiple upflows, ensuring uniform bubble distribution to the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If bubbles are supplied from the inner bottom part of the storage space, then fresh processing liquid can be quickly and continuously supplied to the recesses, but downflow is generated which hinders bubble ascent and reduces processing uniformity
Solution Approach 1:
The single bubble supply location is segmented into multiple bubble supply ports arranged in the vertical direction. This segmentation allows bubbles to be supplied from multiple locations simultaneously, preventing the formation of strong downflows while maintaining efficient liquid replacement and uniform bubble distribution across the substrate surface.
Solution Approach 2:
The bubble supply approach transitions from a horizontal arrangement (single level) to a vertical arrangement (multiple levels). By distributing bubble supply ports across different heights within the storage space, the system achieves uniform bubble coverage without generating harmful downflows, effectively using the vertical dimension to resolve the contradiction.
2Quantity of substance
If processing liquid is supplied from the inner bottom part, then continuous fresh liquid can reach the substrate, but a downflow is generated that reduces processing quality
Solution Approach 1:
The processing liquid supply system is segmented into multiple discharge ports positioned at different vertical locations. This allows the liquid supply to be distributed throughout the storage space, maintaining adequate liquid quantity and flow while preventing the formation of concentrated downflows that would compromise processing quality.
Solution Approach 2:
Different regions of the storage space are provided with locally optimized liquid supply characteristics through strategically positioned discharge ports. This ensures that each local area receives appropriate liquid flow without creating overall downflow patterns, thereby maintaining both sufficient liquid quantity and high processing quality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses the generation of downflows, leading to uniform bubble supply and enhanced substrate processing quality.
Implementation Method 1
These bubbles ascend in the processing liquid and are supplied to the substrate
Implementation Method 2
the processing liquid discharged from the processing liquid discharge port to flow toward an inner bottom surface of the storage space
Implementation Method 3
the flow of the liquid to be split is split into a plurality of upflows and guided to the substrate held by the substrate holder
Data Source
AI summary
At least part of a processing liquid upward flowing in a storage space is split into a plurality of upflows and guided to a substrate held by a substrate holder. Many upflows are widely dispersed and formed in the processing liquid stored in the storage space, and the generation of downflows in the storage space is suppressed. As a result, bubbles are uniformly supplied to the substrate and substrate processing can be performed in high quality.