Temperature-Measuring Substrate Calibration via Needle Contact
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Solution Overview
Problem
The efficiency of temperature measurement using a temperature-measuring substrate is compromised due to labor-intensive calibration processes and the need for frequent manual handling, which also affects the accuracy of temperature adjustment performance checks.
Innovation Solution
A method for calibrating a temperature-measuring substrate involves bringing needle-shaped bodies into contact with electrodes, immersing the substrate in an insulating coolant, measuring electrical resistance values, and acquiring a correction value to convert these values into the coolant temperature, thereby improving measurement efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual calibration processes are used for temperature-measuring substrates, then measurement accuracy can be maintained, but labor intensity increases and efficiency decreases
Solution Approach 1:
The temperature-measuring substrate is designed to be self-calibrating by utilizing the thermal conductivity of the substrate itself. The substrate automatically equilibrates with the reference temperature environment, eliminating the need for manual calibration operations while maintaining measurement accuracy through its inherent thermal properties
Solution Approach 2:
The manual mechanical calibration process is replaced by an automated electrical measurement system. The calibration device automatically measures electrical resistance values and converts them to temperature readings, substituting human-operated mechanical calibration with an automated electrical-thermal conversion system
2Measurement precision
If frequent manual handling of temperature-measuring substrates is performed, then calibration accuracy can be ensured, but measurement efficiency deteriorates
Solution Approach 1:
The substrate is pre-calibrated during manufacturing with reference temperature characteristics stored in its structure. This preliminary calibration eliminates the need for frequent re-calibration operations, as the substrate retains its calibration data and can be directly used for measurements without repeated handling
Solution Approach 2:
The calibration device enables continuous temperature measurement operations without interruption for manual recalibration. The automated system maintains continuous monitoring capability, eliminating downtime associated with frequent manual handling and recalibration operations
3Reliability
If complex calibration procedures are implemented, then measurement reliability improves, but operational complexity increases
Solution Approach 1:
Complex manual calibration procedures are replaced by an automated electrical resistance measurement system. The device automatically performs electrical measurements, converts resistance values to temperature readings, and stores calibration data, eliminating complicated manual operations while ensuring reliable temperature control
Solution Approach 2:
Electrical resistance serves as an intermediary parameter between the physical temperature state and the measurement system. Instead of directly measuring temperature through complex procedures, the system measures electrical resistance and converts it to temperature, simplifying the measurement process while maintaining reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the labor intensity of calibration, enhances the accuracy of temperature measurements, and improves the efficiency of temperature adjustment performance checks, leading to more reliable temperature control in semiconductor device inspections.
Implementation Method 1
measuring an electrical resistance value of the temperature-measuring resistor through the electrode using the needle-shaped body; measuring a temperature of the insulating coolant; and acquiring a correction value for converting the measured electrical resistance value to the measured temperature of the insulating coolant
Implementation Method 2
measuring an electrical resistance value of the temperature-measuring resistor through the electrode using the needle-shaped body
Data Source
AI summary
A method for calibrating a temperature-measuring substrate having a plurality of temperature-measuring resistors and electrodes arranged to correspond to the plurality of temperature-measuring resistors is disclosed. The method comprises: bringing a needle-shaped body into contact with an electrode corresponding to at least one temperature-measuring resistor; immersing the temperature-measuring substrate into an insulating coolant; measuring an electrical resistance value of the temperature-measuring resistor through the electrode using the needle-shaped body; measuring a temperature of the insulating coolant; and acquiring a correction value for converting the measured electrical resistance value to the measured temperature of the insulating coolant.