Substrate Processing Camera Association via Image-Based Self-Mapping
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Solution Overview
Problem
Conventional methods for associating multiple cameras with respective subject areas in substrate processing apparatuses require manual operation and visual checks, leading to high operator workload and potential human errors.
Innovation Solution
A substrate processing apparatus that includes at least one processing unit, first and second cameras, and an association processing unit. The association processing unit generates association information by processing images captured by the cameras, allowing for automated association of cameras with subject areas.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual operation and visual check are used for associating cameras with subject areas, then the association can be performed, but the operator workload increases and human errors may occur
Solution Approach 1:
The system performs self-association by automatically capturing images with each camera, identifying subject areas through image processing, and generating association information without requiring manual operator intervention. The apparatus associates cameras with processing units autonomously based on the captured images and extracted features.
Solution Approach 2:
The manual mechanical process of operator visual inspection and recording is replaced with an automated optical and computational system. Cameras capture images, image processing units analyze the visual data to identify subject areas, and the system automatically generates association information, substituting human operational mechanics with automated technological processes.
2Adaptability or versatility
If serial communication is used for cameras, then the communication line can be shared and camera addition is facilitated, but the cameras and subject areas must be preliminarily associated to identify which subject area is imaged by which camera
Solution Approach 1:
The system automatically performs the association setup process by capturing images with each camera, processing the images to identify subject areas, and generating the necessary association information. This eliminates the need for manual preliminary association configuration when adding new cameras to the serial communication system.
Solution Approach 2:
The association information is generated automatically as part of the system initialization or camera addition process, rather than requiring separate manual configuration. The image processing and association generation occur in advance of actual monitoring operations, preparing the system for immediate use.
Data Source
AI summary
A substrate processing apparatus processes a substrate. The substrate processing apparatus includes at least one processing unit that processes the substrate, first and second cameras that image different subject areas, and an association processing unit that generates association information indicating association between each of the subject areas and each of the first and second cameras by processing an image captured by each of the first and second cameras.