Substrate Carrier Latching Structure for Leak-Tight Transfer Stability
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Solution Overview
Problem
The increasing size and weight of substrates in semiconductor manufacturing pose challenges in maintaining the leak tightness and stability of substrate carriers during transfer, as conventional gripping mechanisms struggle to handle larger substrates effectively, leading to potential damage and loss of integrity.
Innovation Solution
A substrate carrier latching structure featuring a detachable module with first and second fasteners, positioning posts, and alignment members, made from materials like Cycloolefin copolymer with carbon nanotubes, which distributes force through multiple connection points to enhance stability and prevent leak tightness loss during handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the size and weight of substrates are increased, then the processing capacity and functionality are improved, but the stability and leak tightness of substrate carriers during transfer deteriorate
Solution Approach 1:
The connection structure is segmented into multiple fasteners (first fasteners on the carrier, second fasteners on the cover) distributed at different locations, rather than using a single connection point. This segmentation allows the connection force to be distributed across multiple points, maintaining stability even as substrate size and weight increase.
Solution Approach 2:
The invention combines multiple connection elements (fasteners, positioning posts, alignment members) into an integrated connection system. The positioning posts and alignment members work together with the fasteners to create a unified structure that maintains both the leak tightness and stability required for handling larger substrates.
2Device complexity
If conventional gripping mechanisms are used, then the device complexity is low, but the ability to handle larger substrates effectively deteriorates
Solution Approach 1:
The connection structure serves multiple functions: the fasteners provide mechanical connection, the positioning posts ensure proper alignment, and the alignment members guide the mating process. This multi-functional design allows a single connection system to handle various substrate sizes and weights effectively, replacing the need for multiple specialized gripping mechanisms.
Solution Approach 2:
The positioning posts and alignment members act as intermediaries between the fasteners and the substrate carrier components. They facilitate the connection process by ensuring proper alignment and positioning before the fasteners engage, making the overall system more adaptable to different substrate sizes without increasing complexity.
Data Source
AI summary
The invention discloses a substrate carrier latching structure, which mainly comprises a top portion, a cover and a detachable module. The top portion is disposed on the enclosure of a substrate carrier, and the cover is connected to the top portion via a detachable module. As such, the excessive stress on the substrate carrier is avoided to maintain the integrity of substrates stored in the inner portion of the substrate carrier.