Substrate Carrier Turntable Layout for Fast Replacement and Positioning
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Solution Overview
Problem
Existing substrate support units for thin film deposition are complex and time-consuming to maintain, particularly when replacing individual substrate carriers, due to rigid coupling and synchronization requirements.
Innovation Solution
A substrate support unit with a rotatable turntable and independently oriented substrate carrier units, each driven by a separate drive, allowing for easy replacement and precise positioning without synchronizing with other carriers, using vacuum-compatible drives and reduced cable connections for improved accuracy and maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If all substrate carriers are rigidly coupled to one another on a rotation plate, then the structure is stable, but replacement of an individual substrate carrier becomes complex and time-consuming
Solution Approach 1:
The system divides the substrate support into independent substrate carrier units that are not rigidly coupled to each other. Each substrate carrier unit can be independently removed and replaced without affecting the others, enabling easy maintenance while maintaining structural stability through the turntable platform.
2Ease of operation
If a single drive rotates both the rotation plate and all substrate carriers, then the structure is simple, but adjusting an individual substrate carrier becomes complex and time-consuming
Solution Approach 1:
The drive system is segmented into a first drive for rotating the turntable and multiple second drives for independently rotating each substrate carrier unit. This segmentation enables individual adjustment of substrate carriers without complex synchronization requirements.
Solution Approach 2:
The system transitions from a static rigid coupling to a dynamic independent rotation system where each substrate carrier unit can be adjusted independently through its own second drive, allowing flexible positioning without rigid constraints.
3Measurement precision
If drives are positioned far from substrate carriers, then cable connections are simpler, but positioning accuracy of substrate carriers decreases
Solution Approach 1:
The second drives are extracted from the central location and positioned directly at each substrate carrier unit. This extraction reduces the transmission distance for positioning signals and improves positioning accuracy, while the modular design manages the increased installation complexity.
4Measurement precision
If multiple electric cables are used for position determination, then control is more precise, but cable complexity and thermal stress increase
Solution Approach 1:
The system replaces extensive mechanical cable connections with wireless communication or integrated positioning systems. This substitution reduces cable complexity and thermal stress while maintaining precise position determination through electronic or optical means.
Data Source
AI summary
A substrate support unit including a turntable which is rotatable around a first axis and which is driven by a first drive. A plurality of substrate carrier units are arranged concentric to the first axis on the turntable. Each of the plurality of substrate carrier units includes a substrate carrier which is rotatable around a corresponding second axis and which is driven by a second drive, wherein all second axes are parallel to the first axis.