Substrate Carrying Mechanism Torque Control and Alarm Display
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Solution Overview
Problem
Conventional substrate processing apparatuses face challenges in accurately determining the reason for halts in carrying mechanisms, leading to unnecessary stops due to torque limitation or vibration sensor activation, and require on-site adjustment tools for setting torque limitation values, complicating operations.
Innovation Solution
A substrate processing apparatus with a manipulation unit for displaying the state of carrying mechanisms and a control unit that enables or disables torque limitation, using state detection sensors to report stop reasons and display alarms, allowing for remote parameter setting and precise torque control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If torque limitation function is set for all motions, then safety of carrying mechanism is improved, but unnecessary stopping occurs due to torque control operation
Solution Approach 1:
The patent applies different torque limitation settings to different carrying mechanisms based on their specific requirements. The control unit determines whether to apply torque limitation to each carrying mechanism individually, allowing torque control only where necessary for safety while maintaining high-speed operation elsewhere, thus resolving the contradiction between safety and throughput.
2Stability of the object's composition
If vibration is excessively suppressed, then stability of carrying mechanism is improved, but carrying speed and throughput are decreased
Solution Approach 1:
The patent dynamically adjusts vibration suppression parameters based on the operational state and requirements of each carrying mechanism. The control unit modifies torque limitation parameters in real-time, allowing high-speed operation when stability is sufficient and increasing suppression only when necessary, thus maintaining both speed and stability.
3Measurement precision
If torque limitation values are adjusted using adjustment tool, then precision of torque control is improved, but device complexity and ease of operation are worsened due to additional tools and on-site adjustment requirements
Solution Approach 1:
The patent enables the substrate processing apparatus to automatically determine and adjust torque limitation values for its own carrying mechanisms without requiring external adjustment tools. The control unit calculates appropriate torque limits based on motor specifications and carrying mechanism characteristics, eliminating the need for separate adjustment tools and simplifying the system.
Solution Approach 2:
The control unit performs multiple functions including motion control, torque limitation determination, and parameter storage within a single integrated system. This multi-functionality eliminates the need for separate adjustment tools and interfaces, reducing device complexity while maintaining precise torque control capabilities.
4Adaptability or versatility
If torque limitation values are adjusted on-site, then adaptability to specific carrying mechanism is improved, but loss of time and ease of operation are worsened due to transportation of adjustment tool to customer's clean room
Solution Approach 1:
The apparatus automatically determines torque limitation values during normal operation without requiring external tools or personnel intervention. The control unit calculates and applies appropriate torque limits based on real-time feedback and pre-stored parameters, eliminating the need for on-site adjustments and associated time losses.
Solution Approach 2:
The patent stores torque limitation values and motor specifications in advance within the control unit's storage. These pre-calculated parameters are ready for immediate use when carrying mechanisms are configured, eliminating the need for time-consuming on-site measurements and adjustments while maintaining adaptability to specific mechanisms.
Data Source
AI summary
Provided are a substrate processing apparatus and a method of displaying an abnormal state of the substrate processing apparatus. The substrate processing apparatus including: a manipulation unit including a manipulation screen displaying a state of at least one of a substrate carrying mechanism and a substrate processing mechanism; and a control unit including a carrying system controller controlling the substrate carrying mechanism. The manipulation unit comprises a setting screen through which detection conditions of sensors configured to detect states of the substrate carrying mechanism and the substrate processing mechanism, and information about a torque limitation including the enabling or disabling of the torque control and a torque control value are set for the substrate carrying mechanism. The carrying system controller assigns a motion of the substrate carrying mechanism to a carrying control module based on an instruction from the manipulation unit, and the carrying control module controls the substrate carrying mechanism according to the instruction and the information.