Substrate Case Cleaning Apparatus Segmentation
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Solution Overview
Problem
Conventional substrate case cleaning apparatuses face challenges in cleaning double-layer substrate cases, where contaminants on the outer pod can cause secondary contamination of the inner pod, compromising cleaning precision.
Innovation Solution
A substrate case cleaning apparatus with separate cleaning tanks for the outer and inner pods, utilizing a conveyance mechanism to individually clean and assemble the components, preventing cross-contamination and enhancing cleaning precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single cleaning tank is used to clean both outer pod and inner pod, then device complexity is reduced, but cleaning precision deteriorates due to secondary contamination from outer pod to inner pod
Solution Approach 1:
The cleaning tank is divided into two separate tanks: a first cleaning tank for the outer pod and a second cleaning tank for the inner pod. This segmentation prevents contaminant transfer from the outer pod to the inner pod, thereby maintaining high cleaning precision while managing device complexity through functional separation.
Solution Approach 2:
The inner pod cleaning function is extracted from the outer pod cleaning process. By separating the cleaning operations into distinct tanks, the harmful factor (contaminant transfer) is eliminated, allowing each pod to be cleaned independently with appropriate cleaning conditions.
2Manufacturing precision
If separate cleaning tanks are used for outer pod and inner pod, then cleaning precision is improved, but device complexity increases
Solution Approach 1:
The cleaning system is segmented into two independent cleaning tanks, each dedicated to a specific pod. This segmentation achieves high cleaning precision by preventing cross-contamination while managing complexity through clear functional division and independent operation of each tank.
3Ease of operation
If conventional cleaning apparatus is used for double-layer substrate case, then ease of operation is maintained, but cleaning precision deteriorates due to inability to prevent secondary contamination
Solution Approach 1:
The cleaning apparatus uses segmented cleaning tanks for the outer pod and inner pod, allowing each to be cleaned independently. This maintains ease of operation through automated conveyance while achieving high cleaning precision by preventing secondary contamination from the outer pod to the inner pod.
Data Source
AI summary
Contaminant which sticks to an outer pod which is exposed to the outside air is prevented from contaminating an inner pod and the two can be cleaned so the cleaning precision can be improved. A substrate case C which is provided with an inner pod N which holds a substrate at the inside and an outer pod M which holds the inner pod N at the inside is cleaned in a state with no substrate. A booth 10 which forms a clean space is provided. Inside the booth 1, a first cleaning tank 40 which cleans the parts of the outer base Mb and outer shell Ms of the outer pod M in a separated state and a second cleaning tank 50 which holds and cleans the parts of the inner base Nb and inner shell Ns of the inner pod N in a separated state are provided. A conveyance mechanism is provided with conveys these parts to the corresponding first cleaning tank 40 and second cleaning tank 50.