Substrate Centering via Transport Robot Mediator
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Solution Overview
Problem
Existing substrate processing systems face challenges in aligning the rotation center and geometric center of a substrate, making precise centering adjustments difficult due to differing orientations between the resist coating and defect detection devices.
Innovation Solution
A substrate processing apparatus and method that utilize a transport robot, substrate processor, detector, and controller to calculate and adjust the position deviation of the substrate's center, ensuring alignment by detecting peripheral and inner edge positions and adjusting the carry-in operation based on schedule management information.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the substrate is transported and held by different devices (resist coating device and defect detection device) with different orientations, then the substrate can be processed and inspected, but the centering adjustment becomes difficult because the orientation of the holding position in the resist coating device does not necessarily equal the orientation of the holding position in the defect detection device
Solution Approach 1:
The patent introduces a transport robot as an intermediary device between the resist coating device and the defect detection device. The transport robot holds the substrate and transports it between devices, providing a common reference frame. By measuring the substrate's position deviation relative to the transport robot's holding position and then adjusting the transport robot's carrying operation, the system achieves accurate centering adjustment despite the different orientations of the processing and inspection devices.
2Adaptability or versatility
If the holding position orientation in the resist coating device is different from the holding position orientation in the defect detection device, then each device can be optimized for its specific function, but the centering adjustment cannot be easily performed using only the position deviation from the defect detection device
Solution Approach 1:
The transport robot serves as a mediator that connects the resist coating device and the defect detection device. It holds the substrate with a standardized orientation and transports it between devices with different holding position orientations. The controller calculates the position deviation based on measurements from the defect detection device and adjusts the transport robot's carrying operation accordingly, enabling accurate centering without requiring complex integration between the processing and inspection devices.
Solution Approach 2:
The system uses the position deviation information obtained from the defect detection device's measurement of the substrate to automatically adjust the transport robot's carrying operation. This self-service approach allows the system to perform centering adjustment using the available measurement data without requiring additional complex adjustment mechanisms or manual intervention.
Data Source
AI summary
A substrate is transported to a coating processing unit. An annular region of one surface of the substrate is processed. The substrate is carried into an edge exposure unit. Positions of a peripheral edge of the substrate and an inner edge of the annular region are detected. A position deviation amount of a center of the substrate held by a spin chuck from a rotation center of the spin chuck is calculated. Based on schedule management information, a relationship between orientations of the substrate held by the spin chuck at the time of carrying of the substrate into the coating processing unit and the substrate held by the substrate rotation unit at the time of carrying of the substrate into the edge exposure unit is specified. Based on the relationship, a position deviation direction of the center of the substrate from the rotation center is determined.