Compact Substrate Processing Centering via Vertical Actuator Nesting
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Solution Overview
Problem
Existing substrate processing systems are bulky due to the vertical and horizontal expansion caused by the placement of driving portions relative to the processing liquid drain cup, leading to inefficiencies in bevel processing and full-surface processing.
Innovation Solution
A substrate processing apparatus with a substrate holding unit that rotates the substrate around a vertical axis, a processing liquid supplying unit, a cylindrical guard to capture scattered liquid, and a centering unit with an actuator that moves contacting portions horizontally to center the substrate, allowing for compact design and improved processing uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the driving portions are disposed lower than the drain cup with portions extending outward beyond the drain cup's outer peripheral surface, then the substrate position setting apparatus can contact and position the substrate, but the substrate processing unit becomes large in both vertical and horizontal directions
Solution Approach 1:
The centering actuator is repositioned from a horizontal arrangement (extending outward beyond the drain cup) to a vertical arrangement (disposed above the drain cup). This dimensional change allows the actuator to overlap with the drain cup in plan view while being positioned vertically above it, eliminating the need for horizontal extension and reducing the overall footprint of the substrate processing unit.
Solution Approach 2:
The centering actuator is positioned to overlap with the drain cup in plan view, creating a nested spatial relationship where the actuator occupies the vertical space above the drain cup. This nesting arrangement allows both components to coexist in a compact configuration, with the actuator's vertical positioning enabling it to function without increasing the horizontal dimensions of the processing unit.
2Volume of moving object
If the substrate processing unit is made compact by repositioning the centering actuator above the drain cup, then the overall size is reduced, but the liquid receiving and centering functions must coexist in overlapping spatial regions
Solution Approach 1:
The substrate processing unit is segmented into distinct functional zones: the drain cup occupies the lower horizontal region for liquid reception, while the centering actuator occupies the vertical space above it for substrate positioning. This segmentation allows both functions to operate independently within their respective spatial domains, reducing interference despite the overlapping planar footprint.
Solution Approach 2:
The centering actuator is designed with vertical movability, allowing it to adjust its position in the vertical direction to accommodate the substrate positioning operation. This dynamic positioning capability enables the actuator to function effectively in the compact configuration above the drain cup, maintaining operational efficiency despite the reduced spatial separation between components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves improved uniformity in bevel processing and full-surface processing while maintaining a compact size by efficiently managing the processing liquid and centering mechanism, reducing the overall size of the processing system.
Implementation Method 1
a substrate holding unit that rotates a disk-shaped substrate around a vertical rotational axis passing through a central portion of the substrate
Data Source
AI summary
A substrate processing apparatus includes a spin chuck, rotating a disk-shaped substrate around a rotational axis while holding it horizontally, a cylindrical guard, receiving a processing liquid scattered outward from the substrate held by the spin chuck, and a centering unit, which brings a center of the substrate close to the rotational axis. The centering unit includes a pusher, contacting the substrate on the spin chuck, and a linear motor, moving the pusher horizontally to move the substrate horizontally with respect to the spin chuck. At least a portion of the linear motor is disposed above the guard such as to overlap with the guard in plan view.