Substrate Processing Chamber Cleaning for Acidic Gas Containment
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Solution Overview
Problem
The discharge of toxic acidic gases, such as hydrochloric acid gas, from substrate processing chambers poses a risk of personal injury when the chamber is left open for maintenance or inspection.
Innovation Solution
A substrate processing apparatus and method that maintains a lower pressure inside the processing chamber than outside, performing emergency cleaning operations when the pressure difference exceeds a threshold, and includes periodic and maintenance cleaning to prevent gas discharge during chamber openings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the chamber is kept closed to prevent acidic gas discharge, then operator safety is improved, but maintenance and inspection operations become difficult
Solution Approach 1:
The system performs preliminary actions by continuously monitoring pressure differential and automatically initiating cleaning operations before the chamber is opened. The pressure sensor detects when internal pressure exceeds external pressure, triggering the cleaning mechanism in advance to eliminate acidic gas hazards before operator exposure becomes possible
Solution Approach 2:
The system employs feedback control through pressure sensors that continuously monitor the pressure differential between chamber interior and exterior. When the pressure differential exceeds a predetermined threshold, the controller automatically activates the cleaning operation, creating a closed-loop safety system that responds to actual conditions rather than relying on manual intervention
2Object-affected harmful factors
If the chamber pressure is maintained lower than outside pressure, then acidic gas leakage is prevented, but pressure control system complexity increases
Solution Approach 1:
The system changes the critical parameter from maintaining continuous negative pressure to monitoring pressure differential thresholds. By switching from an active pressure maintenance approach to a threshold-based triggering mechanism, the system reduces the complexity of continuous pressure control while achieving the same safety objective through automated cleaning when pressure conditions indicate potential leakage risk
3Object-affected harmful factors
If automated cleaning operations are implemented, then safety is improved, but device complexity and operational time increase
Solution Approach 1:
The system implements self-service automation where the cleaning mechanism serves itself through automatic triggering. The pressure sensor and controller work together to autonomously initiate cleaning operations without external intervention, making the safety system self-regulating and reducing the need for complex manual control procedures while improving operator safety
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents the accidental release of acidic gases by automatically initiating cleaning operations when the chamber is opened, ensuring operator safety.
Implementation Method 1
a substrate processing operation of processing a substrate by supplying a treatment liquid to a substrate loaded into a processing space of a processing container... performed at a pressure at which a pressure in the processing space is lower than a pressure outside the processing space
Implementation Method 2
an emergency cleaning operation of temporarily cleaning the interior of the processing container... including supplying a cleaning liquid to a support unit rotating in the processing space to clean an upper surface of the support unit and an inner surface of the processing container
Implementation Method 3
supplying a cleaning liquid to a support unit rotating in the processing space to clean an upper surface of the support unit and an inner surface of the processing container
Data Source
AI summary
Disclosed is a method of processing a substrate, the method including: a substrate processing operation of processing a substrate by supplying a treatment liquid to a substrate loaded into a processing space of a processing container; and a container cleaning operation of cleaning an interior of the processing container in a state where the substrate is unloaded from the processing space, in which the container cleaning operation includes: a periodic cleaning operation of periodically cleaning the interior of the processing container; and an emergency cleaning operation of temporarily cleaning the interior of the processing container when a set condition is satisfied.