Substrate Processing Chamber Lift Layout to Prevent Lower Chamber Tilting
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Solution Overview
Problem
Conventional substrate processing apparatuses require a large size and complex configuration due to serially arranged driving members, leading to instability and tilting issues when moving the lower chamber, which affects the correct combination with the upper chamber and reduces stability during upward and downward movements.
Innovation Solution
The apparatus employs at least one driving member with a supporting element, first and second driving elements disposed in parallel, and a connecting element to stabilize the lower chamber, along with compensating and balancing members to prevent tilting, allowing for stable upward and downward movement with a simplified structure and reduced size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If two driving members are arranged in serial under the lower chamber, then the lower chamber can be moved in upward and downward directions, but the apparatus requires increased space for driving shafts stroke, resulting in large size and complex configuration
Solution Approach 1:
The patent merges two separate driving members into a single integrated driving member that includes both a first driving element and a second driving element. The first driving element moves the lower chamber, while the second driving element moves the first driving element itself. This consolidation reduces the number of independent driving systems from two to one, thereby simplifying the overall configuration while maintaining the capability to move the lower chamber in upward and downward directions.
Solution Approach 2:
The patent reorganizes the driving elements from a serial arrangement (where two driving members are stacked or placed end-to-end) to a parallel arrangement (where the first and second driving elements are positioned side-by-side). This dimensional reconfiguration allows the driving shafts to operate in parallel spaces, reducing the required stroke space in any single direction and thereby decreasing the overall apparatus size and complexity.
2Ease of operation
If driving members are disposed under one end portion of the lower chamber, then the lower chamber can be moved, but the lower chamber becomes tilted during movement, reducing stability and preventing correct combination with the upper chamber
Solution Approach 1:
The patent employs asymmetric positioning of the driving elements relative to the lower chamber. The first driving element and second driving element are disposed at different locations - the first driving element is positioned to move the lower chamber, while the second driving element is positioned to move the first driving element. This asymmetric arrangement, combined with proper structural support, ensures that the driving forces are distributed in a way that prevents tilting while maintaining movement capability.
Solution Approach 2:
The patent incorporates a supporting element that extends from the first driving element to support the lower chamber. This supporting element acts as a counterbalancing structure that offsets the tilting moment generated by the asymmetric driving arrangement. By providing this counterbalancing support, the system maintains the lower chamber's stability and prevents tilting during movement, ensuring correct combination with the upper chamber.
Data Source
AI summary
An apparatus for processing a substrate may include an upper chamber, a lower chamber being combined with the upper chamber and separated from the upper chamber, and at least one driving member for moving the lower chamber in an upward direction and a downward direction. The least one driving member may include a supporting element for supporting the lower chamber, a first driving element for moving the lower chamber and the supporting element, a second driving element for moving the lower chamber, the supporting element and the first driving element, the second driving element being disposed adjacent to the first driving element, and a connecting element for connecting the first driving element to the second driving element. A processing space may be provided between the upper chamber and the lower chamber when the lower chamber is combined with the upper chamber.