Substrate Processing Chamber Lift Structure to Prevent Tilting
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Solution Overview
Problem
Conventional substrate processing apparatuses require a large size and complex configuration due to serially arranged driving members, leading to instability and tilting issues when moving the lower chamber, which affects the correct combination with the upper chamber and reduces stability during upward and downward movements.
Innovation Solution
The apparatus employs at least one driving member with a supporting element, a first driving element, and a second driving element disposed in parallel, connected by a connecting element, along with a compensating member to balance the lower chamber and prevent tilting, allowing for stable upward and downward movement without increasing the apparatus's size or complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If two driving members are arranged in serial under the lower chamber, then the lower chamber can be moved in upward and downward directions, but the driving shafts require increased space for stroke, resulting in larger apparatus size and more complicated configuration
Solution Approach 1:
The patent combines two driving members into a single integrated driving member that includes both a first driving element and a second driving element. The first driving element is connected to the supporting element, and the second driving element is connected to the first driving element through a connecting element, forming a unified structure that reduces overall complexity while maintaining the capability to move the lower chamber in upward and downward directions.
2Ease of operation
If two driving members are arranged in serial under the lower chamber, then the lower chamber can be moved in upward and downward directions, but the apparatus requires a relatively large size due to increased stroke space for driving shafts
Solution Approach 1:
The patent combines two driving members into a single integrated driving member that includes both a first driving element and a second driving element. The first driving element is connected to the supporting element, and the second driving element is connected to the first driving element through a connecting element, forming a unified structure that reduces overall complexity while maintaining the capability to move the lower chamber in upward and downward directions.
3Ease of operation
If the driving members are disposed under one end portion of the lower chamber, then the lower chamber can be moved, but the lower chamber becomes tilted during movement, reducing stability and preventing correct combination with the upper chamber
Solution Approach 1:
The patent positions the driving member at one end portion of the lower chamber in an asymmetric configuration. The first driving element is connected to one end portion of the supporting element, while the second driving element is connected to the other end portion through a connecting element. This asymmetric arrangement with sequential connection prevents tilting by ensuring balanced force distribution during movement, thereby maintaining stability and enabling correct combination with the upper chamber.
Data Source
AI summary
An apparatus for processing a substrate may include an upper chamber, a lower chamber being combined with the upper chamber and separated from the upper chamber, and at least one driving member for moving the lower chamber in an upward direction and a downward direction. The least one driving member may include a supporting element for supporting the lower chamber, a first driving element for moving the lower chamber and the supporting element, a second driving element for moving the lower chamber, the supporting element and the first driving element, the second driving element being disposed adjacent to the first driving element, and a connecting element for connecting the first driving element to the second driving element. A processing space may be provided between the upper chamber and the lower chamber when the lower chamber is combined with the upper chamber.