Integrated Substrate Measurement for Real-Time Recipe Correction
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Solution Overview
Problem
In manufacturing systems, unexpected changes in conditions can lead to errors and defective substrates due to the inability to identify which operations of the process recipe need modification.
Innovation Solution
An integrated substrate measurement system that includes a substrate measurement subsystem and a processing chamber with sensors, where a controller generates instructions for transferring substrates to obtain measurements, maps these measurements, and determines whether to modify the process recipe based on the data from both systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the substrate is processed according to the pre-determined process recipe without modifications, then the manufacturing process can proceed efficiently, but errors can result during the process and a finished substrate can be defective when unexpected condition changes occur
Solution Approach 1:
The system implements feedback by measuring substrate properties at multiple stages (before processing, during processing, and after processing) and using this information to determine whether to modify the process recipe. The controller receives measurement data from the substrate measurement subsystem and processing chamber sensors, compares it against expected values, and automatically adjusts process parameters to maintain substrate quality while preserving manufacturing efficiency.
2Reliability
If an operation of the process recipe is modified in view of the changed condition, then errors can be prevented during processing, but it can be difficult for an operator to identify which operation should be modified
Solution Approach 1:
The system performs self-service by automatically analyzing measurement data and determining which process operations need modification without requiring operator intervention. The controller autonomously compares measured substrate properties against process specifications, identifies deviations, and determines the appropriate process recipe modifications needed, eliminating the difficulty operators face in identifying which operations to change.
Solution Approach 2:
The controller acts as an intermediary between the measurement subsystem and the process recipe. It receives raw measurement data from the substrate measurement subsystem and processing chamber sensors, processes this information through analysis algorithms, and translates it into specific process recipe modifications. This intermediary function bridges the gap between detection and action, making the system both reliable and easy to operate.
3Reliability
If multiple measurements are taken at different stages of processing, then real-time adjustments can be made to improve substrate quality, but the system complexity increases with multiple subsystems and data mapping requirements
Solution Approach 1:
The controller serves multiple functions: it manages the substrate measurement subsystem, receives data from processing chamber sensors, performs data mapping and correlation analysis, determines process recipe modifications, and executes the modified process steps. This multi-functional approach consolidates what could be separate complex systems into a single coordinated control unit, reducing overall system complexity while maintaining the ability to take multiple measurements and make real-time adjustments for improved substrate quality.
Data Source
AI summary
A process recipe associated with a substrate at a manufacturing system is identified. A first set of measurements for the substrate is obtained from a substrate measurement subsystem. A second set of measurements for the substrate is obtained from one or more sensors of a chamber of the manufacturing system. A determination is made based on the obtained first set of measurements and the obtained second set of measurements of whether to modify the process recipe by at least one of modifying an operation of the process recipe or generating an instruction to prevent completion of execution of one or more operations of the process recipe.