Substrate Chamber Safety Valve Interlock for High-Pressure Fluid Supply
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Solution Overview
Problem
In semiconductor manufacturing, the removal of organic solvents from substrates using supercritical fluids poses safety risks due to potential uncontrolled high-pressure fluid supply and pressure buildup, especially when controller errors or power disruptions occur, leading to dangerous situations like tank bursting.
Innovation Solution
A substrate treating apparatus with a safety valve system, where a safety valve is controlled by a dedicated module to ensure the chamber is closed before fluid supply, and a separate control module manages other valves, using a solenoid or normal close valve to prevent high-pressure fluid leaks and maintain tank pressure stability even during power cuts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If multiple valves are controlled by one controller to simplify the control system, then device complexity is reduced, but reliability deteriorates due to potential uncontrolled fluid supply in abnormal situations
Solution Approach 1:
The control system is segmented into a main controller for normal operation and a dedicated safety controller for emergency situations. The safety controller is independently connected to the solenoid valve, creating a separate control pathway that ensures fluid supply can be stopped even if the main controller fails.
Solution Approach 2:
A safety controller acts as an intermediary between the main controller and the solenoid valve. This intermediary monitors the fluid supply process and can independently intervene to close the valve if abnormalities are detected, preventing direct control failures from causing accidents.
2Productivity
If a solenoid valve is used for rapid fluid supply control, then productivity is improved, but object-generated harmful factors worsen due to potential high-pressure fluid leakage
Solution Approach 1:
The solenoid valve is pre-configured with a safety interlock system that checks chamber closure status before allowing fluid supply. The safety controller continuously monitors system state and is ready to immediately close the valve if any abnormal condition is detected, preventing harmful fluid leakage before it can occur.
Solution Approach 2:
A feedback mechanism is implemented where the safety controller continuously monitors chamber status and valve position. This real-time feedback ensures that the solenoid valve only operates under safe conditions and can be immediately stopped if the chamber state changes unexpectedly.
3Ease of operation
If the chamber is kept open for easy substrate loading, then ease of operation is improved, but object-affected harmful factors worsen due to risk of fluid supply to open chamber
Solution Approach 1:
The safety controller implements a preliminary check before allowing fluid supply to verify that the chamber is properly closed. This preliminary anti-action prevents fluid from being supplied to an open chamber, counteracting the potential hazard before it can affect the system.
Solution Approach 2:
The safety controller serves as an intermediary that mediates between the substrate loading process and fluid supply. It monitors chamber closure status and only permits fluid supply when the chamber is confirmed closed, ensuring safe operation during substrate handling.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures safe operation by confirming the chamber is closed before fluid supply, preventing accidents and maintaining stability by isolating the safety valve's operation from other control modules, thus preventing pressure leaks and enhancing apparatus reliability.
Implementation Method 1
the safety valve is opened after confirming that the chamber has been switched to a closed state when supplying the treating fluid from a tank to the chamber
Implementation Method 2
a process of removing the organic solvent remaining on the substrate using a supercritical fluid is performed
Implementation Method 3
the organic solvent is removed
Data Source
AI summary
The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber providing a treating space; and a fluid supply unit supplying a treating fluid to the chamber, and wherein the fluid supply unit includes: a supply tank storing the treating fluid; a supply line connecting the supply tank and the chamber; and a plurality of valves installed at the supply line, and wherein any one valve among the plurality of valves is provided as a safety valve, and wherein the safety valve is opened after confirming that the chamber has been switched to a closed state when supplying the treating fluid from a tank to the chamber.