Substrate Clamping Device Rotary Lifting Mechanism
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Solution Overview
Problem
Current substrate clamping devices in sputtering machines are inadequate as they fail to securely hold substrates without frequent replacement, leading to alignment issues, substrate warpage, and reduced production capacity due to the need for frequent metal mask disassembly and reassembly, which affects film formation quality.
Innovation Solution
A substrate clamping device with clamping arms and a rotary lifting mechanism that allows for simultaneous rotation and lifting movements, using a ball screw mechanism and spring for stable clamping, and symmetrically arranged clamping jaws to securely hold substrates without requiring frequent metal mask changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional fixtures are mounted on the long side of the substrate, then the substrate can be clamped during coating, but the short sides cannot be secured and frequent metal mask replacement is required
Solution Approach 1:
The clamping device is divided into multiple independent clamping arms (at least three, preferably four) that can be distributed around the substrate. This segmentation allows each arm to independently clamp different regions of the substrate, providing stable fixation without requiring frequent mask replacement, thus resolving the contradiction between clamping reliability and production capacity.
Solution Approach 2:
The invention transitions from traditional single-side or two-side clamping to multi-directional clamping by arranging clamping arms around the substrate in different directions. This dimensional change enables comprehensive substrate fixation, securing both long sides and short sides simultaneously, thereby improving reliability without reducing productivity.
2Reliability
If multiple fixtures are used to clamp the substrate, then better fixation is achieved, but the limited space of the coating chamber restricts the number of fixtures
Solution Approach 1:
Each clamping arm is designed as a multi-functional component that combines bracket and clamping jaw structures. The arms can perform both positioning and clamping functions simultaneously, reducing the total number of separate fixtures needed while maintaining substrate positioning accuracy and fixing reliability.
Solution Approach 2:
The invention merges the substrate support function and the clamping function into an integrated system where multiple clamping arms work together on a single substrate. This combination achieves reliable multi-point fixation without requiring numerous separate fixtures, thus resolving the space constraint issue in the coating chamber.
3Adaptability or versatility
If metal mask is mounted on fixtures for replacement, then different mask models can be used, but disassembly and verification every time wastes time
Solution Approach 1:
The clamping arms are pre-positioned and adjusted to optimal locations before substrate processing. This preliminary setup ensures that when mask replacement is needed, the arms are already in the correct positions, eliminating the need for time-consuming realignment and verification during mask changes, thus reducing replacement time while maintaining flexibility.
4Adaptability or versatility
If frequent disassembly of fixtures occurs, then mask replacement is enabled, but components are easily damaged increasing costs
Solution Approach 1:
The clamping arms are designed with dynamic adjustment capabilities, allowing them to be repositioned and reconfigured for different mask models without complete disassembly. This dynamic design reduces mechanical stress on components during mask changes, minimizing damage and extending component life while maintaining high adaptability for different mask types.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device provides reliable substrate fixation, reduces the need for frequent metal mask replacement, minimizes substrate warpage, and enhances film formation quality by maintaining precise alignment and reducing stress-induced defects.
Implementation Method 1
The rotary lifting mechanism is a ball screw, the bracket is provided with a thread groove matched with the ball screw
Implementation Method 2
A spring is disposed between the clamping arm and the trolley to provide a downward direction elastic force for the clamping arm
Data Source
AI summary
The present invention relates to a display manufacturing field. Disclosed is a substrate clamping device. The substrate is arranged on the trolley. The clamping arms arranged on the trolley are used for fixing the substrate. The clamping arms move up and down as rotating by means of the rotary lifting mechanism, thereby clamping and releasing the substrate. The impact on the substrate is small in the entire clamping process, and the handling of the substrate is facilitated. The clamping arms arranged around the substrate and symmetrically arranged in pair can keep the force of the substrate uniformly and can clamp the substrate more reliably.