Substrate Cleaning Brush Radial Flow Paths
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Solution Overview
Problem
Existing substrate cleaning brushes face challenges in effectively removing particles from the outer circumferential portion, leading to reduced brush lifespan due to particle accumulation and difficulty in discharging processing liquids from the brush main body.
Innovation Solution
A substrate cleaning brush design featuring a brush main body with a liquid-permeable structure, including a main flow path and sub flow paths that extend outward, allowing processing liquids to permeate the outer circumferential portion, along with a protruding portion and recessed portion for secure connection and balanced rotation, facilitating effective particle removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of stationary object
If a conventional brush main body structure is used, then the brush can maintain structural simplicity, but particles accumulate in the outer circumferential portion and the brush lifespan is curtailed
Solution Approach 1:
The flow path is segmented into multiple sub-flow paths that branch off from the main flow path and extend to different radial positions. This segmentation allows processing liquid to be discharged at multiple locations throughout the brush main body, particularly reaching the outer circumferential portion where particles accumulate, thereby preventing particle buildup and extending brush lifespan.
Solution Approach 2:
The invention uses hydraulic flow of processing liquid through the brush main body to remove particles. The processing liquid flows through the main flow path and sub-flow paths, utilizing fluid dynamics to carry particles away from the brush, especially from the outer circumferential portion where conventional designs fail to effectively discharge particles.
2Object-generated harmful factors
If processing liquid is discharged only from the center of the brush, then the brush structure remains simple, but particles on the outer circumferential portion cannot be effectively removed
Solution Approach 1:
The flow path is divided into a main flow path and multiple sub-flow paths that branch off and extend radially outward to different positions. This segmentation enables the processing liquid to reach and discharge particles from various regions of the brush main body, including the outer circumferential portion, without requiring a completely complex structural redesign.
Solution Approach 2:
The sub-flow paths extend in the radial direction (width direction) perpendicular to the vertical axis, adding a dimensional component to the flow path structure. This allows processing liquid to be discharged not only from the center but also from outer regions of the brush, effectively addressing particle accumulation in previously unreachable areas.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enhances the removal of particles from the outer circumferential portion of the brush, reducing particle accumulation and extending the brush's usable lifespan by ensuring efficient discharge of processing liquids and improved cleaning performance.
Implementation Method 1
a brush main body having an upper surface and a lower surface with a liquid permeable structure
Data Source
AI summary
A substrate cleaning brush for cleaning a wafer includes a brush main body, a brush holding unit, and a main flow path forming body. The brush main body has a liquid permeable structure and includes a lower surface that comes into contact with a substrate. The brush holding unit holds the brush main body while exposing a distal end portion in a vertical direction of the brush main body to the outside. The main flow path forming body includes a main flow path and a plurality of sub flow paths. The main flow path is formed to allow a processing liquid supplied from the outside to pass therethrough. The plurality of sub flow paths branch off from the main flow path, extend outward in a width direction perpendicular to the vertical direction of the brush main body, and are connected to an upper surface of the brush main body.