Substrate Cleaning via Liquid Isopropyl Alcohol Spray

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Solution Overview

Problem

Existing substrate treatment methods often result in particles adhering to substrates, degrading their cleanliness and treatment quality due to the use of hydrophobizing agents and isopropyl alcohol, which can leave residual particles and fail to effectively remove contaminants.

Innovation Solution

A substrate treatment method involving a first gas treating step with an organic solvent, a water-repellency treatment step, and a spraying step where the substrate is dipped into liquid isopropyl alcohol, ensuring a larger quantity of organic solvent is applied to effectively remove particles, while maintaining the chamber in a decompressed state to manage pressure and prevent contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If vapor of isopropyl alcohol is supplied to substrate in decompressed state, then substrate treatment is performed, but particles remain on substrate due to insufficient quantity of organic solvent

Engineering Contradiction:

Improvesubstrate treatment qualityVSAvoidparticle contamination

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent changes the physical state parameter of isopropyl alcohol from vapor phase to liquid phase during substrate treatment. By supplying liquid isopropyl alcohol instead of vapor, the substrate receives a larger quantity of organic solvent, enabling effective particle removal while maintaining decompressed chamber conditions

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent uses a liquid supply mechanism to deliver isopropyl alcohol to the substrate in liquid form within the decompressed chamber. This hydraulic approach ensures sufficient quantity of solvent reaches the substrate surface for effective particle removal

Inventive Principle:

Principle #29Pneumatics and hydraulics

2Reliability

If hydrophobizing agent is supplied to substrate in decompressed state, then water-repellency treatment is achieved, but residual particles are generated on substrate

Engineering Contradiction:

Improvewater-repellency treatment qualityVSAvoidresidual particles from hydrophobizing agent

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent applies liquid isopropyl alcohol to the substrate before or during the hydrophobizing agent treatment. This preliminary action of providing sufficient organic solvent prevents the formation of residual particles when the hydrophobizing agent is subsequently applied

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent uses liquid isopropyl alcohol as an intermediary substance that facilitates the application of hydrophobizing agent while preventing particle formation. The liquid solvent acts as a medium that allows controlled interaction between the hydrophobizing agent and substrate without generating residuals

Inventive Principle:

Principle #24Intermediary (Mediator)

3Reliability

If chamber is maintained in decompressed state, then treatment environment is controlled, but liquid isopropyl alcohol supply becomes difficult

Engineering Contradiction:

Improvedecompressed chamber environment controlVSAvoidliquid supply operation

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The patent employs a specialized liquid supply mechanism designed to function in decompressed environments. This hydraulic system overcomes the operational difficulties of supplying liquid isopropyl alcohol to substrates while maintaining vacuum conditions in the chamber

Inventive Principle:

Principle #29Pneumatics and hydraulics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method significantly reduces particle contamination on substrates, improving their cleanliness and treatment quality by ensuring thorough removal of residual agents and contaminants, even in a decompressed chamber environment.

Implementation Method 1

the gas of the organic solvent is dew-condensed on a surface of the substrate and changes to liquid of the organic solvent on the surface of the substrate

Methodology Applied

Scientific EffectDew condensation: Condensation

Implementation Method 2

A hydrophobizing agent causes a surface of a substrate to be hydrophobic

Methodology Applied

Scientific EffectHydrophobizing: Hydrophobe

Implementation Method 3

a spraying step of spraying a first liquid including liquid of an organic solvent over the substrate inside the chamber

Methodology Applied

Scientific EffectSpray cleaning: Fluid Spray

Data Source

PatentUS20230035447A1Substrate treatment method and substrate treatment device

Publication Date: 2023.02.02 SCREEN HOLDINGS CO LTD

AI summary

A substrate treatment method includes a first gas treating step, a water-repellency treatment step, and a spraying step. In the first gas treating step, a first gas is supplied to the substrate inside the chamber in a state in which the inside of the chamber is decompressed. The first gas includes gas of an organic solvent. The water-repellency treatment step is executed after the first gas treating step. In the water-repellency treatment step, the inside of the chamber is in the decompressed state, and a water-repellent agent is supplied to the substrate inside the chamber. The spraying step is executed after the water-repellency treatment step. In the spraying step, the inside of the chamber is in the decompressed state, and a first liquid is sprayed over the substrate inside the chamber. The first liquid includes liquid of an organic solvent.